Studies of Ultraviolet Radiation from Hydrogen-Xenon Plasma at the Plasma Focus Facility

IF 0.5 4区物理与天体物理 Q4 PHYSICS, NUCLEAR

Physics of Atomic Nuclei Pub Date : 2026-08-02 DOI:10.1134/S1063778826130132

V. I. Krauz, A. N. Gritsuk, V. V. Myalton, A. M. Kharrasov, Yu. V. Vinogradova

引用次数: 0

Abstract

The paper explores the potential of plasma focus facilities for developing a test setup for X-ray optic elements for extreme ultraviolet lithography. It is shown that the ISPF-M facility, using a hydrogen-xenon mixture as the working gas, provides a pulsed source of extreme ultraviolet radiation with a peak intensity in the region of ≈11 nm, and the integrated radiation output in the range of 10–12 nm per pulse can reach ≥10 J.

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等离子体聚焦装置中氢氙等离子体紫外线辐射的研究

本文探讨了等离子体聚焦装置在开发极紫外光刻x射线光学元件测试装置方面的潜力。结果表明，以氢氙混合物为工作气体的ISPF-M装置可提供峰值强度约为11 nm的脉冲极紫外辐射源，每脉冲在10 ~ 12 nm范围内的综合辐射输出可达≥10 J。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Physics of Atomic Nuclei 物理-物理：核物理

CiteScore

0.60

自引率

25.00%

发文量

审稿时长

3-6 weeks

期刊介绍： Physics of Atomic Nuclei is a journal that covers experimental and theoretical studies of nuclear physics: nuclear structure, spectra, and properties; radiation, fission, and nuclear reactions induced by photons, leptons, hadrons, and nuclei; fundamental interactions and symmetries; hadrons (with light, strange, charm, and bottom quarks); particle collisions at high and superhigh energies; gauge and unified quantum field theories, quark models, supersymmetry and supergravity, astrophysics and cosmology.