Progress in two-dimensional nanomaterials for micro-/nano-electromechanical system sensors: fabrication and applications

IF 2.3 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Frontiers of Materials Science Pub Date : 2026-02-17 DOI:10.1007/s11706-026-0751-6

Mohammad Raza Miah, Nahida Akter, Sakil Mahmud, Ayub Nabi Khan, Md. Abdul Jalil, Ranajit Kumar Nag, Md. Mahmudul Alam Sarker, Shahjalal Khandaker, M. Mahbubul Bashar, Jin Zhu

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引用次数: 0

Abstract

The performance of micro-/nano-electromechanical systems (M/NEMSs) has been significantly improved through the integration of two-dimensional (2D) nanomaterials such as graphene, transition metal chalcogenides and hexagonal boron nitride, mainly due to their excellent mechanical strength, high electrical conductivity and superior thermal and chemical stability. Moreover, the fabrication, integration and functional properties of 2D nanomaterial-based M/NEMSs have been the subject of extensive research, especially regarding device reliability, packaging and pathways to large-scale commercialization. Furthermore, in the fields of biosensing and medical diagnostics, the inherent biocompatibility, photoactivity, and mechanical flexibility of 2D nanomaterials enable rapid response and high-sensitivity detection. Finally, future industrial applications will rely on scalable and cost-effective packaging solutions. The MEMS market is expected to grow at a compound annual growth rate (CAGR) of 7.9%, from $16.5 billion in 2024 to $24.2 billion in 2029.

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微/纳米机电系统传感器用二维纳米材料的研究进展：制备与应用

石墨烯、过渡金属硫族化物和六方氮化硼等二维（2D）纳米材料的集成使微/纳米机电系统（M/NEMSs）的性能得到了显著提高，这主要是因为它们具有优异的机械强度、高导电性和优异的热稳定性和化学稳定性。此外，基于二维纳米材料的M/NEMSs的制造、集成和功能特性一直是广泛研究的主题，特别是在器件可靠性、封装和大规模商业化途径方面。此外，在生物传感和医学诊断领域，二维纳米材料固有的生物相容性、光活性和机械灵活性使其能够快速响应和高灵敏度检测。最后，未来的工业应用将依赖于可扩展和具有成本效益的包装解决方案。MEMS市场预计将以7.9%的复合年增长率（CAGR）增长，从2024年的165亿美元增长到2029年的242亿美元。

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来源期刊

Frontiers of Materials Science MATERIALS SCIENCE, MULTIDISCIPLINARY-

CiteScore

4.20

自引率

3.70%

发文量

515

期刊介绍： Frontiers of Materials Science is a peer-reviewed international journal that publishes high quality reviews/mini-reviews, full-length research papers, and short Communications recording the latest pioneering studies on all aspects of materials science. It aims at providing a forum to promote communication and exchange between scientists in the worldwide materials science community. The subjects are seen from international and interdisciplinary perspectives covering areas including (but not limited to): Biomaterials including biomimetics and biomineralization; Nano materials; Polymers and composites; New metallic materials; Advanced ceramics; Materials modeling and computation; Frontier materials synthesis and characterization; Novel methods for materials manufacturing; Materials performance; Materials applications in energy, information and biotechnology.