The effect of metal doping on the piezoelectric response of AlN film ultrasonic transducers

IF 6.3 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of The European Ceramic Society Pub Date : 2026-07-01 Epub Date: 2026-01-24 DOI:10.1016/j.jeurceramsoc.2026.118169

Xiaomei Zeng , Heng Jiang , Rakhimbergan Rakhimov , Shavkat Yuldashev , Changwei Zou , Jun Zhang , Oleksandr Pohrebniak , Bing Yang , Sheng Liu , Vasiliy O. Pelenovich

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Abstract

Piezoelectric AlN thick films doped with Cr, Cu, Nb, Sc, Ta, Ti, Y, Zn, and Zr were deposited on Si and stainless-steel substrates using reactive RF magnetron sputtering. Planar Al sputter target with asymmetrically embedded disk of doping metal was employed in this study. The concentration of doping metal in the deposited films was a function of the distance between the substrate and the inlaid disk. Analysis of the film structure showed that, with the exception of ScAlN and ZnAlN films, the columnar structure and piezoelectric response of doped films were gradually degraded with increasing metal concentration. The piezoelectric d₃₃^eff constants of ScAlN (6.7 at% of Sc), ZnAlN (1.6 at% of Zn), NbAlN (1.2 at% of Nb), TiAlN (0.7 at% of Ti), and AlN films are 10.1 ± 0.5 pC/N, 5.3 ± 0.5 pC/N, 5.2 ± 0.5 pC/N, 5.2 ± 0.5 pC/N, and 5.6 ± 0.5 pC/N, respectively. Pulse-echo response of these films was studied using ultrasonic transducers and correlation between their piezoelectric d₃₃^eff constant and amplitude of the response was found.

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金属掺杂对AlN膜超声换能器压电响应的影响

采用反应性射频磁控溅射技术在Si和不锈钢衬底上制备了掺杂Cr、Cu、Nb、Sc、Ta、Ti、Y、Zn和Zr的压电AlN厚膜。采用不对称嵌入掺杂金属盘的平面铝溅射靶。沉积膜中掺杂金属的浓度是衬底与镶嵌盘之间距离的函数。对薄膜结构的分析表明，除了ScAlN和ZnAlN薄膜外，掺杂薄膜的柱状结构和压电响应随着金属浓度的增加而逐渐退化。的压电d33eff常量ScAlN (Sc) 6.7 %,ZnAlN锌(1.6 %),NbAlN Nb(1.2 %),TiAlN (Ti) 0.7 %,和AlN电影10.1 ±0.5 pC / N, 5.3±0.5 pC / N, 5.2±0.5 pC / N, 5.2±0.5 pC / N,和5.6 ±0.5 pC / N,分别。利用超声换能器研究了这些薄膜的脉冲回波响应，发现了它们的压电d33eff常数与响应幅度之间的相关性。

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来源期刊

Journal of The European Ceramic Society 工程技术-材料科学：硅酸盐

CiteScore

10.70

自引率

12.30%

发文量

863

审稿时长

35 days

期刊介绍： The Journal of the European Ceramic Society publishes the results of original research and reviews relating to ceramic materials. Papers of either an experimental or theoretical character will be welcomed on a fully international basis. The emphasis is on novel generic science concerning the relationships between processing, microstructure and properties of polycrystalline ceramics consolidated at high temperature. Papers may relate to any of the conventional categories of ceramic: structural, functional, traditional or composite. The central objective is to sustain a high standard of research quality by means of appropriate reviewing procedures.