Deformation mechanism of gallium nitride in nanometric cutting

IF 3.9 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Advances in Manufacturing Pub Date : 2025-01-25 DOI:10.1007/s40436-024-00534-9

Xu Ma, Min Lai, Feng-Zhou Fang

引用次数: 0

Abstract

Gallium nitride (GaN) is a third-generation semiconductor and an important optical material requiring high surface integrity. In this study, molecular dynamics simulations were conducted to investigate the machining mechanism of single-crystal GaN during nanometric cutting. The stress distribution and generation/motion of dislocations in GaN during nanometric cutting were found to be closely related to slip systems. The relationship between the crystal phase transformation and dislocations during cutting was also identified. Microcracks occur during the unloading of stress perpendicular to the (0 0 0 1) plane. The fluctuation of the cutting forces during cutting was explained from the perspective of crystal phase transformation. This study helps understand the deformation mechanism of materials with hexagonal close-packed crystal structures in nanometric cutting and promotes the development of relevant mechanical processing technologies.

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氮化镓纳米切削变形机理研究

氮化镓（GaN）是第三代半导体材料，也是要求高表面完整性的重要光学材料。本研究采用分子动力学模拟方法研究纳米切削过程中单晶氮化镓的加工机理。研究发现，纳米切削过程中氮化镓的应力分布和位错的产生/运动与滑移系统密切相关。确定了切削过程中晶体相变与位错之间的关系。微裂纹发生在垂直于（0 0 0 1）面的应力卸载过程中。从晶体相变的角度解释了切削力在切削过程中的波动。本研究有助于了解六方密排晶体结构材料在纳米切削中的变形机理，促进相关机械加工技术的发展。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Advances in Manufacturing Materials Science-Polymers and Plastics

CiteScore

9.10

自引率

3.80%

发文量

274

期刊介绍： As an innovative, fundamental and scientific journal, Advances in Manufacturing aims to describe the latest regional and global research results and forefront developments in advanced manufacturing field. As such, it serves as an international platform for academic exchange between experts, scholars and researchers in this field. All articles in Advances in Manufacturing are peer reviewed. Respected scholars from the fields of advanced manufacturing fields will be invited to write some comments. We also encourage and give priority to research papers that have made major breakthroughs or innovations in the fundamental theory. The targeted fields include: manufacturing automation, mechatronics and robotics, precision manufacturing and control, micro-nano-manufacturing, green manufacturing, design in manufacturing, metallic and nonmetallic materials in manufacturing, metallurgical process, etc. The forms of articles include (but not limited to): academic articles, research reports, and general reviews.