High-Frequency Thin-Film Magnetic Sensor for Precise Magnetic Near-Field Measurement

IF 1.1 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEJ Transactions on Electrical and Electronic Engineering Pub Date : 2025-09-13 DOI:10.1002/tee.70152

Loi Tonthat, Ryota Suzuki, Jerdvisanop Chakarothai, Katsumi Fujii, Shin Yabukami

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Abstract

Highly sensitive magnetic field sensors are essential for applications such as biomedical diagnostics and electromagnetic compatibility (EMC) assessments. This study focuses on optimizing a GHz-range thin-film magnetic sensor by incorporating a slit pattern in the magnetic layer, which improves impedance matching and current distribution. Amorphous CoNbZr thin-film sensors with slit widths ranging from 0 μm (no slit) to 50 μm were fabricated. Among these, the 10 μm slit design exhibited the best impedance matching and magnetic field sensitivity. Additionally, a carrier suppression circuit was implemented to reduce phase noise, resulting in improved sensitivity, achieving a minimum detectable field of 1.41 × 10⁻¹¹ T/√Hz. The sensor was employed for precise near-field measurements in wireless power transfer (WPT) systems, where it outperformed conventional loop antennas. Experimental results demonstrated superior sensitivity and enhanced spatial resolution, particularly near the ferromagnetic resonance under specific DC bias and carrier frequency conditions. These findings highlight the potential of the optimized sensor for improving electromagnetic interference (EMI) and EMC assessments. © 2025 The Author(s). IEEJ Transactions on Electrical and Electronic Engineering published by Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.

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用于精确磁场近场测量的高频薄膜磁传感器

高灵敏度磁场传感器对于生物医学诊断和电磁兼容性（EMC）评估等应用至关重要。本研究的重点是通过在磁层中加入狭缝模式来优化ghz范围的薄膜磁传感器，从而改善阻抗匹配和电流分布。制备了缝宽为0 ~ 50 μm的非晶态CoNbZr薄膜传感器。其中，10 μm狭缝设计具有最佳的阻抗匹配和磁场灵敏度。此外，还采用了载波抑制电路来降低相位噪声，从而提高了灵敏度，实现了1.41 × 10−11 T/√Hz的最小可检测场。该传感器在无线电力传输（WPT）系统中用于精确的近场测量，其性能优于传统的环形天线。实验结果表明，在特定的直流偏置和载频条件下，该方法具有优越的灵敏度和增强的空间分辨率，特别是在铁磁共振附近。这些发现突出了优化后的传感器在改善电磁干扰（EMI）和EMC评估方面的潜力。©2025作者。电气与电子工程学报，日本电气工程师学会和Wiley期刊公司出版。

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来源期刊

IEEJ Transactions on Electrical and Electronic Engineering 工程技术-工程：电子与电气

CiteScore

2.70

自引率

10.00%

发文量

199

审稿时长

4.3 months

期刊介绍： IEEJ Transactions on Electrical and Electronic Engineering (hereinafter called TEEE ) publishes 6 times per year as an official journal of the Institute of Electrical Engineers of Japan (hereinafter "IEEJ"). This peer-reviewed journal contains original research papers and review articles on the most important and latest technological advances in core areas of Electrical and Electronic Engineering and in related disciplines. The journal also publishes short communications reporting on the results of the latest research activities TEEE ) aims to provide a new forum for IEEJ members in Japan as well as fellow researchers in Electrical and Electronic Engineering from around the world to exchange ideas and research findings.