Dual-band high-absorption metasurface vanadium oxide uncooled detector.

Abstract

Vanadium oxide (VOx) uncooled detectors are gaining increasing market share due to their small size, low cost, no cooling requirement, and reliable performance. However, as the pixel sizes of these detectors decrease, the problem of reduced absorptances becomes more prominent. To address this issue, this study proposes a "MIM+umbrella" metasurface VOx uncooled detector. Through simulation optimization, we achieved an average absorptance of over 97% in the long-wave infrared range and also demonstrated excellent absorption characteristics in the mid-infrared band. Furthermore, we validated and compared the contributions of this dual-layer metasurface to the absorptance of VOx uncooled detectors through fabrication and testing, demonstrating the feasibility and superiority of this structure.