Yao Bai, Shan Gao, Jing Yang, Yan Liu, Yijian Chen, Can Yang, Guopei Mao, Zheng Zhu, Jinhui Shi, Libo Yuan, Chunying Guan
{"title":"High-sensitivity fiber gas pressure sensor based on the Vernier effect generated by femtosecond laser-inscribed micro-cascaded FPIs.","authors":"Yao Bai, Shan Gao, Jing Yang, Yan Liu, Yijian Chen, Can Yang, Guopei Mao, Zheng Zhu, Jinhui Shi, Libo Yuan, Chunying Guan","doi":"10.1364/AO.572004","DOIUrl":null,"url":null,"abstract":"<p><p>We demonstrate a Vernier effect-enhanced all-fiber gas pressure sensor with an extremely simple structure. The sensor consists of a rectangular air cavity near the end face of a single-mode fiber (SMF) fabricated by femtosecond laser micromachining. The two walls of the air cavity and the end face of the SMF form micro cascaded Fabry-Perot interferometers to generate the Vernier effect. The sensor exhibits a gas pressure sensitivity of 79.69 nm/MPa within a range of 0.1-2.5 MPa, an ultralow temperature cross-sensitivity of 0.0002 MPa/°C, and excellent stability. Owing to its straightforward fabrication and outstanding performance, the sensor holds significant potential for mass production and application in confined spaces for high-precision gas pressure monitoring.</p>","PeriodicalId":101299,"journal":{"name":"Applied optics","volume":"64 26","pages":"7668-7676"},"PeriodicalIF":0.0000,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/AO.572004","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We demonstrate a Vernier effect-enhanced all-fiber gas pressure sensor with an extremely simple structure. The sensor consists of a rectangular air cavity near the end face of a single-mode fiber (SMF) fabricated by femtosecond laser micromachining. The two walls of the air cavity and the end face of the SMF form micro cascaded Fabry-Perot interferometers to generate the Vernier effect. The sensor exhibits a gas pressure sensitivity of 79.69 nm/MPa within a range of 0.1-2.5 MPa, an ultralow temperature cross-sensitivity of 0.0002 MPa/°C, and excellent stability. Owing to its straightforward fabrication and outstanding performance, the sensor holds significant potential for mass production and application in confined spaces for high-precision gas pressure monitoring.
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