Theoretical modeling of ultrasonic cavitation micro-jet impact and experimental study on deburring of crossed V-groove edges

IF 6.8 1区工程技术 Q1 ENGINEERING, MANUFACTURING

Journal of Manufacturing Processes Pub Date : 2025-09-20 DOI:10.1016/j.jmapro.2025.09.035

Yu Lei , Xipeng Xu , Bicheng Guo , Zhilong Xu , Jiashun Gao , Wenbin Zhong , Wenhan Zeng

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Abstract

V-groove microstructures are widely used in optics, energy, and electronics due to their excellent functional properties. However, burr formation during ultra-precision machining can significantly compromise surface quality and machining accuracy. This study explores an ultrasonic cavitation deburring method specifically designed for the crossed edges of V-grooves. A theoretical model was established to describe the relationship between the maximum micro-jet impact pressure generated by cavitation bubble collapse and the key process parameters, namely the working gap and ultrasonic amplitude. This model clarifies the burr removal mechanism and defines the critical conditions required for effective deburring. Experiments were conducted to optimize three major parameters: deburring time, ultrasonic amplitude, and working gap. In addition, the influence of cavitation erosion on the surface quality of micro V-grooves was analyzed. The results showed that a burr removal rate of up to 92.1 % was achieved within 40 s, while surface roughness variation was controlled within 15 %.

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超声空化微射流冲击理论建模及交叉v型槽边去毛刺实验研究

v型槽微结构以其优异的功能特性在光学、能源、电子等领域得到了广泛的应用。然而，在超精密加工过程中，毛刺的形成会严重影响表面质量和加工精度。本研究探索了一种专门针对v型槽交叉边缘的超声空化去毛刺方法。建立了描述空化泡破碎产生的最大微射流冲击压力与关键工艺参数即工作间隙和超声振幅之间关系的理论模型。该模型阐明了毛刺去除机制，并定义了有效去毛刺所需的关键条件。通过实验对去毛刺时间、超声振幅和工作间隙三个主要参数进行了优化。此外，还分析了空化侵蚀对微v型槽表面质量的影响。结果表明，在40 s内毛刺去除率高达92.1%，表面粗糙度变化控制在15%以内。

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来源期刊

Journal of Manufacturing Processes ENGINEERING, MANUFACTURING-

CiteScore

10.20

自引率

11.30%

发文量

833

审稿时长

50 days

期刊介绍： The aim of the Journal of Manufacturing Processes (JMP) is to exchange current and future directions of manufacturing processes research, development and implementation, and to publish archival scholarly literature with a view to advancing state-of-the-art manufacturing processes and encouraging innovation for developing new and efficient processes. The journal will also publish from other research communities for rapid communication of innovative new concepts. Special-topic issues on emerging technologies and invited papers will also be published.