Controllable spiral magnetorheological finishing (CSMRF) method for complex structural surface manufacturing

IF 6.8 1区工程技术 Q1 ENGINEERING, MANUFACTURING

Journal of Manufacturing Processes Pub Date : 2025-09-10 DOI:10.1016/j.jmapro.2025.09.023

Bo Wang , Feng Shi , Guipeng Tie , Wanli Zhang , Ci Song , Ye Tian , Suo Qiao , Xing Peng , Ying Xiong

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引用次数: 0

Abstract

In advanced optical systems, new functions that are difficult to achieve by ordinary optical elements can be achieved by designing the complex surface structure of optical elements. Taking Continuous Phase Plate (CPP) as an example, it has broad application prospects in beam shaping, compensation and modulation. At present, magnetorheological polishing is the main method for polishing CPP. However, due to the influence of tool influence function (TIF) size and processing efficiency, it is difficult to further improve the accuracy of the surface relief structure after processing, which restricts the further improvement of the performance of the optical system. In order to further improve the figuring ability of existing magnetorheological polishing, this study proposes a novel controllable spiral magnetorheological finishing (CSMRF) method. Firstly, the figuring ability of spiral TIFs is analyzed. By analyzing the surface shape structure of CPP, the matching strategy between surface shape error and spiral angle of TIF is established based on genetic algorithm. And the TIF of CSMRF is dynamically compensated, so as to improve the figuring ability of CSMRF. Secondly, through the simulation figuring experiment of double sinusoidal surface with different periodic structures, the control ability of spiral TIFs to different spatial wavelengths is analyzed. The simulation results show that the spiral TIF has better control effect on the frequency band above 8 mm spatial wavelength under the TIF. On this basis, a CSMRF frequency-division processing method is proposed. The CPP of 338.4 mm × 338.4 mm is experimentally processed. Compared with the original method, the low-frequency surface error is reduced from RMS 37.984 nm to RMS 31.64 nm, which verifies the effectiveness of this method in improving the low-frequency surface error figuring ability. Therefore, this work provides theoretical and technical support for the CSMRF processing and manufacturing of high-precision complex surface optical elements, and has great application value.

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复杂结构表面加工的可控螺旋磁流变精加工（CSMRF）方法

在先进的光学系统中，通过设计复杂的光学元件表面结构，可以实现普通光学元件难以实现的新功能。以连续相位板（CPP）为例，它在波束整形、补偿和调制等方面具有广阔的应用前景。目前，磁流变抛光是抛光CPP的主要方法。但由于刀具影响函数（TIF）尺寸和加工效率的影响，加工后表面浮雕结构的精度难以进一步提高，制约了光学系统性能的进一步提高。为了进一步提高现有磁流变抛光的加工能力，提出了一种新型可控螺旋磁流变抛光（CSMRF）方法。首先，分析了螺旋TIFs的成形能力。通过对CPP曲面形状结构的分析，建立了基于遗传算法的曲面形状误差与TIF螺旋角的匹配策略。并对CSMRF的TIF进行了动态补偿，提高了CSMRF的计算能力。其次，通过不同周期结构的双正弦曲面的仿真计算实验，分析了螺旋TIFs对不同空间波长的控制能力。仿真结果表明，螺旋TIF对空间波长大于8mm的频带具有较好的控制效果。在此基础上，提出了一种CSMRF分频处理方法。实验处理了338.4 mm × 338.4 mm的CPP。与原方法相比，低频表面误差从RMS 37.984 nm减小到RMS 31.64 nm，验证了该方法提高低频表面误差计算能力的有效性。因此，本工作为CSMRF加工制造高精度复杂表面光学元件提供了理论和技术支持，具有很大的应用价值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Manufacturing Processes ENGINEERING, MANUFACTURING-

CiteScore

10.20

自引率

11.30%

发文量

833

审稿时长

50 days

期刊介绍： The aim of the Journal of Manufacturing Processes (JMP) is to exchange current and future directions of manufacturing processes research, development and implementation, and to publish archival scholarly literature with a view to advancing state-of-the-art manufacturing processes and encouraging innovation for developing new and efficient processes. The journal will also publish from other research communities for rapid communication of innovative new concepts. Special-topic issues on emerging technologies and invited papers will also be published.