Exploring dynamic energy transfer in electrostatically coupled micro shallow arch sensors

Abstract

This study explores the dynamic energy transfer mechanisms in electrostatically coupled MEMS resonating micro shallow arch sensors. The micro sensor design features two initially curved thin-beam resonators, electrostatically actuated by a single side-wall electrode and electrically coupled to enable mode localization and energy exchange, thereby facilitating the detection of external perturbations in their vicinity. Utilizing the nonlinear Euler–Bernoulli beam formulation, a reduced-order model (ROM) is constructed via the Galerkin procedure to analyze static deflection, eigenvalues, and nonlinear dynamic responses. The findings reveal the presence of veering, crossover phenomena, and energy channeling under varying electrostatic actuation conditions. A detailed parametric study demonstrates the influence of static voltage on the resonators’ fundamental frequencies, highlighting veering behavior and energy redistribution between symmetric and anti-symmetric modes. Moreover, frequency-response analyses confirm the occurrence of coupled resonance, nonlinear frequency interactions, and mode softening. These insights contribute to the advancement of MEMS-based sensing technologies, enhancing their sensitivity and tunability for real-world applications including communications and satellite.