Breakdown and polarization contrasts in ferroelectric devices observed by operando laser-based photoemission electron microscopy with the AC/DC electrical characterization system

IF 2 3区工程技术 Q2 MICROSCOPY

Ultramicroscopy Pub Date : 2025-08-11 DOI:10.1016/j.ultramic.2025.114221

Hirokazu Fujiwara , Yuki Itoya , Masaharu Kobayashi , Cédric Bareille , Toshiyuki Taniuchi

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引用次数: 0

Abstract

We have developed an operando laser-based photoemission electron microscope (laser-PEEM) with a ferroelectric characterization system. A Sawyer-Tower circuit was implemented to measure the polarization–voltage (P–V) characteristics of ferroelectric devices. Using this system, we successfully obtained the well-defined P–V hysteresis loops for a ferroelectric capacitor incorporating Hf_0.5Zr_0.5O₂ (HZO), reproducing the typical field-cycling characteristics of HZO capacitors. After dielectric breakdown caused by field-cycling stress, we visualized a conduction filament through the top electrode without any destructive processing. Additionally, we successfully observed polarization contrast through the top electrode of an oxide semiconductor (InZnO_x). These results indicate that our operando laser-PEEM system is a powerful tool for visualizing conduction filaments after dielectric breakdown, the ferroelectric polarization contrasts, and electronic state distribution of materials implemented in ferroelectric devices, including ferroelectric field-effect transistors and ferroelectric tunnel junctions.

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利用交流/直流电学表征系统，利用operando激光光电发射电子显微镜观察铁电器件的击穿和极化对比

我们开发了一种具有铁电表征系统的基于operando激光的光电电子显微镜（laser-PEEM）。采用索耶-塔式电路测量铁电器件的极化电压特性。利用该系统，我们成功地获得了含有HZO （Hf0.5Zr0.5O2）的铁电电容器的P-V磁滞回线，再现了HZO电容器的典型场循环特性。在场循环应力引起的介质击穿后，我们在没有任何破坏性处理的情况下，通过顶部电极看到了导电丝。此外，我们成功地通过氧化物半导体（InZnOx）的顶电极观察到极化对比。这些结果表明，我们的operando激光- peem系统是一个强大的工具，用于可视化介电击穿后的导电丝，铁电极化对比和铁电器件中材料的电子态分布，包括铁电场效应晶体管和铁电隧道结。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Ultramicroscopy 工程技术-显微镜技术

CiteScore

4.60

自引率

13.60%

发文量

117

审稿时长

5.3 months

期刊介绍： Ultramicroscopy is an established journal that provides a forum for the publication of original research papers, invited reviews and rapid communications. The scope of Ultramicroscopy is to describe advances in instrumentation, methods and theory related to all modes of microscopical imaging, diffraction and spectroscopy in the life and physical sciences.