Air Core ARROW Waveguides Fabricated in a Membrane-Covered Trench.

IF 1.9 4区物理与天体物理 Q2 OPTICS

Photonics Pub Date : 2024-06-01 Epub Date: 2024-05-25 DOI:10.3390/photonics11060502

Seth Walker, Holger Schmidt, Aaron R Hawkins

引用次数: 0

Abstract

We report the design, fabrication, and characterization of hollow-core anti-resonant reflecting optical waveguides (ARROWs) fabricated in a membrane-covered trench. These structures are built on silicon wafers using standard microfabrication techniques, including plasma etching, to form trenches. Four waveguide designs are demonstrated, which have different numbers of thin-film reflecting layers. We demonstrate that optical loss decreases with additional reflecting layers, with measured loss coefficients as low as 1 cm^-1.

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在膜覆盖沟槽中制备空心箭头波导。

我们报告了在膜覆盖沟槽中制造的空心抗谐振反射光波导（箭头）的设计，制造和表征。这些结构是建立在硅片上，使用标准的微加工技术，包括等离子蚀刻，形成沟槽。提出了四种具有不同薄膜反射层数的波导设计方案。我们证明了光学损耗随着反射层的增加而降低，测量到的损耗系数低至1 cm-1。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Photonics Physics and Astronomy-Instrumentation

CiteScore

2.60

自引率

20.80%

发文量

817

审稿时长

8 weeks

期刊介绍： Photonics (ISSN 2304-6732) aims at a fast turn around time for peer-reviewing manuscripts and producing accepted articles. The online-only and open access nature of the journal will allow for a speedy and wide circulation of your research as well as review articles. We aim at establishing Photonics as a leading venue for publishing high impact fundamental research but also applications of optics and photonics. The journal particularly welcomes both theoretical (simulation) and experimental research. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Electronic files and software regarding the full details of the calculation and experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material.