Dimensional metrology based on ultrashort pulse laser and optical frequency comb

IF 3.2 3区工程技术 Q2 ENGINEERING, INDUSTRIAL

Cirp Annals-Manufacturing Technology Pub Date : 2025-01-01 DOI:10.1016/j.cirp.2025.04.094

W. Gao (1) , S.W. Kim (1) , H. Bosse (3) , K. Minoshima

引用次数: 0

Abstract

An insight is given into the fundamental mathematics and physics behind the generation of ultrashort optical pulses by mode-locked lasers, followed by an analysis and comparison of the characteristics between different types of such lasers, from the point of view of applications in dimensional metrology. Measurement technologies utilizing ultrashort pulses as time ruler and nonlinear optics generator in time domain, frequency ruler and white light laser in frequency domain, as well as applications in standards and traceability, are then categorized and presented. Future challenges and developing trends are also discussed.

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基于超短脉冲激光和光频梳的尺寸测量

从尺寸计量应用的角度，深入了解了锁模激光器产生超短光脉冲的基本数学和物理原理，然后分析和比较了不同类型的此类激光器之间的特性。对超短脉冲时域测量技术和非线性光学发生器测量技术、频域测量技术和白光激光器测量技术及其在标准和可追溯性方面的应用进行了分类和介绍。讨论了未来的挑战和发展趋势。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Cirp Annals-Manufacturing Technology 工程技术-工程：工业

CiteScore

7.50

自引率

9.80%

发文量

137

审稿时长

13.5 months

期刊介绍： CIRP, The International Academy for Production Engineering, was founded in 1951 to promote, by scientific research, the development of all aspects of manufacturing technology covering the optimization, control and management of processes, machines and systems. This biannual ISI cited journal contains approximately 140 refereed technical and keynote papers. Subject areas covered include: Assembly, Cutting, Design, Electro-Physical and Chemical Processes, Forming, Abrasive processes, Surfaces, Machines, Production Systems and Organizations, Precision Engineering and Metrology, Life-Cycle Engineering, Microsystems Technology (MST), Nanotechnology.