Hung-Yin Tsai , Yi-Hung Chen , Kuan-Ching Wang , Paul W. Leu , Ming C. Leu (1)
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引用次数: 0
Abstract
This paper describes a new method of growing carbon nanotube (CNT) arrays using laser welding of a catalyst metal onto the surface of a quartz substrate, followed by CNT growth through the chemical vapor deposition (CVD) process. A major advantage of this method is its ability to pattern the catalyst before growing the CNTs, thus allowing for the formation of CNTs at specific locations. The laser pre-treatment method minimized structural damage to CNTs in comparison to the laser post-processing method, achieving a lower ID/IG value of 0.72 in Raman spectroscopy analysis. Using hexagonally patterned CNT arrays on quartz, we achieve a field emission current density exceeding 1.3 mA/cm2 with a reduced turn-on field of 1.85 V/μm, representing a 25% improvement over filled-line patterns.
期刊介绍:
CIRP, The International Academy for Production Engineering, was founded in 1951 to promote, by scientific research, the development of all aspects of manufacturing technology covering the optimization, control and management of processes, machines and systems.
This biannual ISI cited journal contains approximately 140 refereed technical and keynote papers. Subject areas covered include:
Assembly, Cutting, Design, Electro-Physical and Chemical Processes, Forming, Abrasive processes, Surfaces, Machines, Production Systems and Organizations, Precision Engineering and Metrology, Life-Cycle Engineering, Microsystems Technology (MST), Nanotechnology.