Influence of initial microstructure on implantation-induced strain, damage and surface amorphization in AlN

IF 5.8 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of The European Ceramic Society Pub Date : 2025-06-13 DOI:10.1016/j.jeurceramsoc.2025.117627

Stéphanie Jublot-Leclerc , Gabriel Bouhali , Antoine Combrisson , Florian Pallier , Ludovic Largeau , Aurélie Gentils

{"title":"Influence of initial microstructure on implantation-induced strain, damage and surface amorphization in AlN","authors":"Stéphanie Jublot-Leclerc , Gabriel Bouhali , Antoine Combrisson , Florian Pallier , Ludovic Largeau , Aurélie Gentils","doi":"10.1016/j.jeurceramsoc.2025.117627","DOIUrl":null,"url":null,"abstract":"<div><div>The effects of 1) crystalline quality, and 2) radiation-induced pre-existing damage, on the microstructural modifications induced by ion implantation into single crystalline AlN layers were investigated in dedicated experiments. The native dislocations do not have any visible effect on the microstructural changes induced by implantation when point defect recombination is important. They are however shown to considerably reduce the elastic strain, and thus the quantity of point defects, when implantation-induced extended defects are formed. Moreover, an experiment of He implantation performed at 550°C in a material previously damaged by Al implantation is shown to induce the amorphization of an extended surface layer in the material of lower crystalline quality only. This phenomenon apparently results from the combination of several factors, including the combined influence of native dislocations and of a dense network of extended defects created by pre-implantation on the migration and accumulation of point defects at the surface.</div></div>","PeriodicalId":17408,"journal":{"name":"Journal of The European Ceramic Society","volume":"45 15","pages":"Article 117627"},"PeriodicalIF":5.8000,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The European Ceramic Society","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0955221925004479","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}

引用次数: 0

Abstract

The effects of 1) crystalline quality, and 2) radiation-induced pre-existing damage, on the microstructural modifications induced by ion implantation into single crystalline AlN layers were investigated in dedicated experiments. The native dislocations do not have any visible effect on the microstructural changes induced by implantation when point defect recombination is important. They are however shown to considerably reduce the elastic strain, and thus the quantity of point defects, when implantation-induced extended defects are formed. Moreover, an experiment of He implantation performed at 550°C in a material previously damaged by Al implantation is shown to induce the amorphization of an extended surface layer in the material of lower crystalline quality only. This phenomenon apparently results from the combination of several factors, including the combined influence of native dislocations and of a dense network of extended defects created by pre-implantation on the migration and accumulation of point defects at the surface.

查看原文本刊更多论文

AlN中初始微观结构对注入诱导应变、损伤和表面非晶化的影响

通过专门的实验研究了离子注入单晶AlN层引起的微观结构改变对晶体质量和辐射诱导的预先损伤的影响。当点状缺陷复合较重要时，原生位错对植入引起的显微组织变化没有明显影响。然而，当植入引起的扩展缺陷形成时，它们显示出显着降低弹性应变，从而减少点缺陷的数量。此外，在550°C下对先前被Al注入损坏的材料进行He注入的实验表明，仅在晶体质量较低的材料中诱导延伸表面层的非晶化。这种现象显然是由几个因素共同作用的结果，包括原生位错和预植入产生的密集的扩展缺陷网络对表面点缺陷的迁移和积累的综合影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Journal of The European Ceramic Society 工程技术-材料科学：硅酸盐

CiteScore

10.70

自引率

12.30%

发文量

863

审稿时长

35 days

期刊介绍： The Journal of the European Ceramic Society publishes the results of original research and reviews relating to ceramic materials. Papers of either an experimental or theoretical character will be welcomed on a fully international basis. The emphasis is on novel generic science concerning the relationships between processing, microstructure and properties of polycrystalline ceramics consolidated at high temperature. Papers may relate to any of the conventional categories of ceramic: structural, functional, traditional or composite. The central objective is to sustain a high standard of research quality by means of appropriate reviewing procedures.