Calibration of the stiffness of soft cantilevers based on electromagnetic and electrostatic force compensation principles

Abstract

This article presents a modified version of a traceable force-displacement measurement device developed at TU Ilmenau. The calibration of forces is carried out by a balance with the electromagnetic and electrostatic principles of force compensation. As part of this study, the device was used to calibrate the stiffness of soft cantilevers. The expanded relative uncertainty of the measured stiffnesses in the range from 13 mN/m to 100 mN/m ranged from 1.5 % to 2.7 %. The device was also verified through two-way comparison of measurements with the PTB, good agreement was obtained.