Thick-film SmCo5 micromagnet fabrication using molten salt

IF 5.3 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Scripta Materialia Pub Date : 2025-05-30 DOI:10.1016/j.scriptamat.2025.116775

Ryogen Fujiwara, Daisuke Shiga , Masaki Tomita, Mio Otsuru, Kenichi Suzuki, Yoshinori Fujikawa

{"title":"Thick-film SmCo5 micromagnet fabrication using molten salt","authors":"Ryogen Fujiwara, Daisuke Shiga , Masaki Tomita, Mio Otsuru, Kenichi Suzuki, Yoshinori Fujikawa","doi":"10.1016/j.scriptamat.2025.116775","DOIUrl":null,"url":null,"abstract":"<div><div>Sintered Nd-Fe-B magnets encounter thickness and shape limitations due to machining-induced degradation. Although Nd-Fe-B magnetic films show promise, achieving thicker films with complex shapes and larger sample sizes is difficult due to limitations in existing deposition methods. In this study, we successfully developed a method to fabricate a 100-μm-thick SmCo<sub>5</sub> micromagnet film on a complex Co structure using molten-salt processing to diffuse Sm into Co. The magnetic properties of the film were characterized using vibrating sample magnetometry measurements, revealing a zero-field magnetic flux density of ∼1.0 T and coercivity of ∼820 kA/m. The fabricated film exhibited anisotropic magnetism, with its easy magnetization axis aligned along the thickness direction. Utilizing the unique properties of the micromagnet, we then designed and fabricated a stable 1.5-mm-diameter micromotor, capable of rotating at 1,000 rpm. This study enables the fabrication of 100-μm-thick SmCo₅ micromagnets for miniaturized electromagnetic systems, offering potential applications in advanced electromechanical devices.</div></div>","PeriodicalId":423,"journal":{"name":"Scripta Materialia","volume":"266 ","pages":"Article 116775"},"PeriodicalIF":5.3000,"publicationDate":"2025-05-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Scripta Materialia","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1359646225002386","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

Abstract

Sintered Nd-Fe-B magnets encounter thickness and shape limitations due to machining-induced degradation. Although Nd-Fe-B magnetic films show promise, achieving thicker films with complex shapes and larger sample sizes is difficult due to limitations in existing deposition methods. In this study, we successfully developed a method to fabricate a 100-μm-thick SmCo₅ micromagnet film on a complex Co structure using molten-salt processing to diffuse Sm into Co. The magnetic properties of the film were characterized using vibrating sample magnetometry measurements, revealing a zero-field magnetic flux density of ∼1.0 T and coercivity of ∼820 kA/m. The fabricated film exhibited anisotropic magnetism, with its easy magnetization axis aligned along the thickness direction. Utilizing the unique properties of the micromagnet, we then designed and fabricated a stable 1.5-mm-diameter micromotor, capable of rotating at 1,000 rpm. This study enables the fabrication of 100-μm-thick SmCo₅ micromagnets for miniaturized electromagnetic systems, offering potential applications in advanced electromechanical devices.

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熔盐制备厚膜SmCo5微磁体

烧结Nd-Fe-B磁体由于加工引起的退化而遇到厚度和形状限制。尽管Nd-Fe-B磁性薄膜显示出前景，但由于现有沉积方法的限制，很难获得具有复杂形状和更大样品尺寸的更厚的薄膜。在这项研究中，我们成功地开发了一种方法，在复杂的Co结构上使用熔盐工艺将Sm扩散到Co中，制备了100 μm厚的SmCo5微磁膜。利用振动样品磁强计测量了该膜的磁性能，发现该膜的零场磁通密度为~ 1.0 T，矫顽力为~ 820 kA/m。制备的薄膜具有各向异性磁性，磁化轴易沿厚度方向排列。利用微磁体的独特特性，我们设计并制造了一个直径1.5 mm的稳定微电机，能够以1000转/分的速度旋转。这项研究能够为小型化电磁系统制造100 μm厚的SmCo₅微磁体，在先进的机电设备中提供潜在的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Scripta Materialia 工程技术-材料科学：综合

CiteScore

11.40

自引率

5.00%

发文量

581

审稿时长

34 days

期刊介绍： Scripta Materialia is a LETTERS journal of Acta Materialia, providing a forum for the rapid publication of short communications on the relationship between the structure and the properties of inorganic materials. The emphasis is on originality rather than incremental research. Short reports on the development of materials with novel or substantially improved properties are also welcomed. Emphasis is on either the functional or mechanical behavior of metals, ceramics and semiconductors at all length scales.