Breakthroughs in scanning electron microscopy poling of massive dense and porous lead-free piezoelectric ceramics

Abstract

This study exploits a poling method based on the use of the electron beam in scanning electron microscopy (SEM) to fully activate massive porous and dense piezoelectric ceramics, which are difficult to polarize in high electric fields. Key parameters such as scan speed, exposure time, specimen thickness, and the presence of sputtered electrodes, were analyzed for their effect on the poling process, with d₃₃ coefficient measurements used for evaluation. SEM-induced poling activated both dense (410 pC/N) and porous (500 pC/N) lead-free BCTZ ceramics, outperforming traditional oil-based poling (d₃₃ < 350 pC/N). This SEM-induced method offers exceptional flexibility and precision, enabling customizable poling patterns without the need for surface electrodes.