Elaboration, post-annealing and energy harvesting performance of NBT-6BT thick films produced by aerosol deposition

IF 5.8 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of The European Ceramic Society Pub Date : 2025-05-24 DOI:10.1016/j.jeurceramsoc.2025.117559

Anass Chrir , Oscar Rojas , Maxime Bavencoffe , Fernando Rubio-Marcos , Jesús López-Sánchez , Laurence Boyer , Olivier Durand-Panteix , Pascal Marchet

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引用次数: 0

Abstract

This study investigates the fabrication and the properties of 0.94 (Na_0.5Bi_0.5)TiO₃-0.06 BaTiO₃ (NBT-6BT) thick films elaborated by the Aerosol Deposition (AD) method. The as-deposited films exhibit reduced grain size, partial amorphization, and lack of ferro/piezoelectricity. Post-annealing led to a progressive enhancement of crystallinity and grain growth, restoring ferro/piezoelectric properties. Selected Area Diffraction (SAD) patterns of annealed samples confirm the coexistence of tetragonal and rhombohedral phases, characteristic of the morphotropic phase boundary (MPB). The 1000 °C annealed films exhibit the highest properties, with remnant polarization of ∼20 µC·cm⁻², coercive field of 5 kV·mm⁻¹, and maximum strain response of 0.3 % for a 10 KV·mm⁻¹ electric field. In addition, the annealing process reduces the leakage currents, indicating improved film quality. Energy harvesting tests using cantilever-based devices confirm effective mechanical-to-electrical energy conversion, with a maximum harvested power of 3.53 nW. These results highlight the potential of AD-deposited NBT-6BT films for lead-free piezoelectric applications, including sensors, actuators, and energy harvesters.

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气溶胶沉积NBT-6BT厚膜的精化、后退火及能量收集性能

研究了气溶胶沉积（AD）法制备0.94 (Na0.5Bi0.5)TiO3-0.06 BaTiO3 （NBT-6BT）厚膜及其性能。沉积薄膜表现出晶粒尺寸减小、部分非晶化和缺乏铁/压电性。后退火导致结晶度和晶粒生长逐渐增强，恢复铁/压电性能。退火样品的选择区域衍射（SAD）图证实了四方相和菱形相共存，这是相变相边界（MPB）的特征。1000℃退火后的薄膜表现出最高的性能，残余极化为~ 20µC·cm−2，矫顽力场为5 kV·mm−1，在10 kV·mm−1电场下，最大应变响应为0.3 %。此外，退火工艺降低了泄漏电流，表明薄膜质量得到改善。使用悬臂装置的能量收集测试证实了有效的机械能到电能转换，最大收获功率为3.53 nW。这些结果突出了ad沉积NBT-6BT薄膜在无铅压电应用中的潜力，包括传感器、致动器和能量收集器。

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来源期刊

Journal of The European Ceramic Society 工程技术-材料科学：硅酸盐

CiteScore

10.70

自引率

12.30%

发文量

863

审稿时长

35 days

期刊介绍： The Journal of the European Ceramic Society publishes the results of original research and reviews relating to ceramic materials. Papers of either an experimental or theoretical character will be welcomed on a fully international basis. The emphasis is on novel generic science concerning the relationships between processing, microstructure and properties of polycrystalline ceramics consolidated at high temperature. Papers may relate to any of the conventional categories of ceramic: structural, functional, traditional or composite. The central objective is to sustain a high standard of research quality by means of appropriate reviewing procedures.