A Versatile Method for Nano-Fabrication on Diamond Film: Flexible Diamond Metasurfaces as a Demonstration

Abstract

Diamond exhibits unique performance across a wide range of applications due to its enormous presentable properties in electronic, photonic, and quantum fields. Yet heterogeneous integration of diamonds for on-chip functionalities, like 2D materials, remains challenging due to the hard acquisition of scalable, transferable, and ultrathin diamond samples. Recently, edge-exposed exfoliation is demonstrated as an effective way to produce wafer-scale, freestanding, and ultrathin diamond films. However, the incompatibility of the newly developed diamond film with conventional nano-fabrication methods makes it difficult to fabricate diamond film into practical devices. Herein, the mask-transferring by sugar is demonstrated as a versatile method for pattern-definition on diamond films, which shows satisfying geometrical resolution and accuracy comparing to conventional approaches. Additionally, based on this method, the flexible all-diamond metasurfaces functioning as structural colors are achieved, which indicates its wide potential for fabricating more diamond-related devices.