High-quality machining of thin copper plate based on error proofing method

IF 6.1 1区 工程技术 Q1 ENGINEERING, MANUFACTURING
Di Wu
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Abstract

The response characteristics of target materials under dynamic compression have been a focused topic in the fields of shock wave physics and explosion dynamics. Thin copper plate with high-quality surface is frequently applied as flyer in detonation or plate impact experiments to study these characteristics. Nevertheless, existing mechanical machining method is hard to achieve high-quality surface for copper flyer due to ductile property and residual stress. To settle this problem, a technology based on error proofing is proposed to realize thinning, surface shape error control and improving surface quality in turn. Firstly, an isopotential control method is proposed in electrochemical lapping process to suppress stray current corrosion, which lays the foundation for high-efficiency low-stress thinning with MRR = 1 μm /min. Secondly, a chemical mechanical lapping method considering pressure and speed distribution is applied to control surface shape error deterministically with acceptable roughness Sa ≤ 350 nm (measure size: 0.36 mm × 0.27 mm). Then electrochemical mechanical polishing at low pressure (P = 0.27 psi) is applied to obtain surface roughness of Sa ≤ 5 nm with maintained flatness. Finally, a high-quality machining technology for thin copper plate is developed. By the low-stress machining method, copper plate (Φ100 mm × 3 mm) achieves flatness of PV 2 μm and moderate roughness Sa 4.2 nm.

Abstract Image

基于防错方法的薄铜板高质量加工
目标材料在动态压缩下的响应特性一直是冲击波物理和爆炸动力学领域的重点课题。具有高质量表面的薄铜板经常被用作引爆或板冲击实验中的飞行器来研究这些特性。然而,由于延展性和残余应力的影响,现有的机械加工方法很难获得高质量的铜飞边表面。为了解决这一问题,我们提出了一种基于误差校正的技术,以实现减薄、控制表面形状误差和提高表面质量。首先,在电化学研磨工艺中提出了抑制杂散电流腐蚀的等电位控制方法,为实现 MRR = 1 μm /min 的高效低应力减薄奠定了基础。其次,采用考虑压力和速度分布的化学机械研磨方法,确定性地控制表面形状误差,可接受的粗糙度 Sa ≤ 350 nm(测量尺寸:0.36 mm × 0.27 mm)。然后,在低压(P = 0.27 psi)下进行电化学机械抛光,以获得表面粗糙度 Sa ≤ 5 nm 并保持平面度。最后,开发出一种高质量的薄铜板加工技术。通过低压加工方法,铜板(Φ100 mm × 3 mm)的平面度达到 PV 2 μm,中等粗糙度 Sa 4.2 nm。
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来源期刊
Journal of Manufacturing Processes
Journal of Manufacturing Processes ENGINEERING, MANUFACTURING-
CiteScore
10.20
自引率
11.30%
发文量
833
审稿时长
50 days
期刊介绍: The aim of the Journal of Manufacturing Processes (JMP) is to exchange current and future directions of manufacturing processes research, development and implementation, and to publish archival scholarly literature with a view to advancing state-of-the-art manufacturing processes and encouraging innovation for developing new and efficient processes. The journal will also publish from other research communities for rapid communication of innovative new concepts. Special-topic issues on emerging technologies and invited papers will also be published.
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