S. S. Lyubin, M. A. Murzakov, I. I. Ryashko, D. A. Antipov, D. Yu. Kuznetsova
{"title":"Technological Features of Selective Laser Etching in the Processes of Internal Modification of Optical Quartz","authors":"S. S. Lyubin, M. A. Murzakov, I. I. Ryashko, D. A. Antipov, D. Yu. Kuznetsova","doi":"10.3103/S1068335625600093","DOIUrl":null,"url":null,"abstract":"<p>A selective laser etching (SLT) technology has been developed and successfully applied for precision processing of quartz glass up to 2 mm thick. The technology has demonstrated efficiency for two operations: cutting and punching holes. The following parameters have been achieved: roughness, <i>Ra</i> = 0.2 μm and <i>Rz</i> = 0.4 μm; deviation from perpendicularity, 1°; and cutting width, from 10 to 45 μm. Technological intervals for pulse energy, speed, and frequency at which selective etching is possible have been identified. The maximum etching rate of laser-modified quartz glass with a hydrofluoric acid solution is 225 μm/h, indicating a selectivity of about 47 compared to the original glass.</p>","PeriodicalId":503,"journal":{"name":"Bulletin of the Lebedev Physics Institute","volume":"51 12 supplement","pages":"S1061 - S1069"},"PeriodicalIF":0.6000,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Lebedev Physics Institute","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.3103/S1068335625600093","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
A selective laser etching (SLT) technology has been developed and successfully applied for precision processing of quartz glass up to 2 mm thick. The technology has demonstrated efficiency for two operations: cutting and punching holes. The following parameters have been achieved: roughness, Ra = 0.2 μm and Rz = 0.4 μm; deviation from perpendicularity, 1°; and cutting width, from 10 to 45 μm. Technological intervals for pulse energy, speed, and frequency at which selective etching is possible have been identified. The maximum etching rate of laser-modified quartz glass with a hydrofluoric acid solution is 225 μm/h, indicating a selectivity of about 47 compared to the original glass.
期刊介绍:
Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.