Technological Features of Selective Laser Etching in the Processes of Internal Modification of Optical Quartz

IF 0.6 4区 物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY
S. S. Lyubin, M. A. Murzakov, I. I. Ryashko, D. A. Antipov, D. Yu. Kuznetsova
{"title":"Technological Features of Selective Laser Etching in the Processes of Internal Modification of Optical Quartz","authors":"S. S. Lyubin,&nbsp;M. A. Murzakov,&nbsp;I. I. Ryashko,&nbsp;D. A. Antipov,&nbsp;D. Yu. Kuznetsova","doi":"10.3103/S1068335625600093","DOIUrl":null,"url":null,"abstract":"<p>A selective laser etching (SLT) technology has been developed and successfully applied for precision processing of quartz glass up to 2 mm thick. The technology has demonstrated efficiency for two operations: cutting and punching holes. The following parameters have been achieved: roughness, <i>Ra</i> = 0.2 μm and <i>Rz</i> = 0.4 μm; deviation from perpendicularity, 1°; and cutting width, from 10 to 45 μm. Technological intervals for pulse energy, speed, and frequency at which selective etching is possible have been identified. The maximum etching rate of laser-modified quartz glass with a hydrofluoric acid solution is 225 μm/h, indicating a selectivity of about 47 compared to the original glass.</p>","PeriodicalId":503,"journal":{"name":"Bulletin of the Lebedev Physics Institute","volume":"51 12 supplement","pages":"S1061 - S1069"},"PeriodicalIF":0.6000,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Lebedev Physics Institute","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.3103/S1068335625600093","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

Abstract

A selective laser etching (SLT) technology has been developed and successfully applied for precision processing of quartz glass up to 2 mm thick. The technology has demonstrated efficiency for two operations: cutting and punching holes. The following parameters have been achieved: roughness, Ra = 0.2 μm and Rz = 0.4 μm; deviation from perpendicularity, 1°; and cutting width, from 10 to 45 μm. Technological intervals for pulse energy, speed, and frequency at which selective etching is possible have been identified. The maximum etching rate of laser-modified quartz glass with a hydrofluoric acid solution is 225 μm/h, indicating a selectivity of about 47 compared to the original glass.

Abstract Image

光学石英内部改性过程中选择性激光蚀刻的工艺特点
研制了一种选择性激光蚀刻技术,并成功地应用于2毫米厚石英玻璃的精密加工。该技术已经证明了两种作业的效率:切割和冲孔。得到的参数如下:粗糙度Ra = 0.2 μm, Rz = 0.4 μm;垂直度偏差,1°;切割宽度为10 ~ 45 μm。确定了可选择性蚀刻的脉冲能量、速度和频率的技术间隔。在氢氟酸溶液中,激光改性石英玻璃的最大刻蚀速率为225 μm/h,与原玻璃相比,选择性约为47。
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来源期刊
Bulletin of the Lebedev Physics Institute
Bulletin of the Lebedev Physics Institute PHYSICS, MULTIDISCIPLINARY-
CiteScore
0.70
自引率
25.00%
发文量
41
审稿时长
6-12 weeks
期刊介绍: Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.
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