Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies

IF 0.9 4区 材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY
E. Yu. Podshibyakina, A. F. Shimanskii, M. N. Vasil’eva, M. M. Simunin, R. G. Eromasov, T. V. Bermeshev
{"title":"Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies","authors":"E. Yu. Podshibyakina,&nbsp;A. F. Shimanskii,&nbsp;M. N. Vasil’eva,&nbsp;M. M. Simunin,&nbsp;R. G. Eromasov,&nbsp;T. V. Bermeshev","doi":"10.1134/S0020168524701085","DOIUrl":null,"url":null,"abstract":"<p>We have studied the effect of Al<sub>2</sub>O<sub>3</sub> nanofiber on the properties of fused silica ceramics such as are used to produce containers for molten semiconductor materials. The addition of 0.05 to 0.15 wt % alumina nanofiber has been shown to cause an increase in the mechanical strength of ceramics prepared via slip casting. The addition of 0.15 wt % nanofiber increased the compressive strength of the ceramic material obtained at a sintering temperature of 1200°C from 90 ± 4 to 143 ± 9 MPa and its bending strength from 28 ± 2 to 42 ± 3 MPa.</p>","PeriodicalId":585,"journal":{"name":"Inorganic Materials","volume":"60 7","pages":"915 - 919"},"PeriodicalIF":0.9000,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Inorganic Materials","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1134/S0020168524701085","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

Abstract

We have studied the effect of Al2O3 nanofiber on the properties of fused silica ceramics such as are used to produce containers for molten semiconductor materials. The addition of 0.05 to 0.15 wt % alumina nanofiber has been shown to cause an increase in the mechanical strength of ceramics prepared via slip casting. The addition of 0.15 wt % nanofiber increased the compressive strength of the ceramic material obtained at a sintering temperature of 1200°C from 90 ± 4 to 143 ± 9 MPa and its bending strength from 28 ± 2 to 42 ± 3 MPa.

Abstract Image

半导体技术中添加Al2O3纳米纤维的熔融硅容器材料
我们研究了氧化铝纳米纤维对熔融硅陶瓷性能的影响,如用于制造熔融半导体材料的容器。添加0.05 ~ 0.15 wt %的氧化铝纳米纤维可以提高滑移铸造陶瓷的机械强度。0.15 wt %纳米纤维的加入使1200℃烧结陶瓷材料的抗压强度从90±4 MPa提高到143±9 MPa,弯曲强度从28±2 MPa提高到42±3 MPa。
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来源期刊
Inorganic Materials
Inorganic Materials 工程技术-材料科学:综合
CiteScore
1.40
自引率
25.00%
发文量
80
审稿时长
3-6 weeks
期刊介绍: Inorganic Materials is a journal that publishes reviews and original articles devoted to chemistry, physics, and applications of various inorganic materials including high-purity substances and materials. The journal discusses phase equilibria, including P–T–X diagrams, and the fundamentals of inorganic materials science, which determines preparatory conditions for compounds of various compositions with specified deviations from stoichiometry. Inorganic Materials is a multidisciplinary journal covering all classes of inorganic materials. The journal welcomes manuscripts from all countries in the English or Russian language.
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