D. V. Bortko, K. M. Balakhnev, V. A. Shilov, P. V. Borisyuk, O. S. Vasilyev, Yu. Yu. Lebedinskii
{"title":"Using Magnetron Sputtering to Deposit Metal Nanoclusters","authors":"D. V. Bortko, K. M. Balakhnev, V. A. Shilov, P. V. Borisyuk, O. S. Vasilyev, Yu. Yu. Lebedinskii","doi":"10.1134/S1063778824100065","DOIUrl":null,"url":null,"abstract":"<p>Several series of thin tantalum nanocluster films deposited on a quartz crystal are obtained. The masses of the films are measured using a quartz mass sensor. In each series, the films have characteristic particle sizes of 1.5 to 6.5 nm. Results from measuring mass show the ratio of the deposited mass to the incident volume of clusters differs for different sizes. A physical model of the particle deposition process is proposed and studied to explain the observed effect. According to modeling results, the focusing of particles does not change with size and is found to depend weakly on the initial velocity of the particles. It is concluded that the main reason for the above effect could be the difference between the coefficient of adhesion for particles of different sizes. It is proposed that this assumption be tested through additional experiments.</p>","PeriodicalId":728,"journal":{"name":"Physics of Atomic Nuclei","volume":"87 12","pages":"1945 - 1950"},"PeriodicalIF":0.3000,"publicationDate":"2025-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of Atomic Nuclei","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063778824100065","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, NUCLEAR","Score":null,"Total":0}
引用次数: 0
Abstract
Several series of thin tantalum nanocluster films deposited on a quartz crystal are obtained. The masses of the films are measured using a quartz mass sensor. In each series, the films have characteristic particle sizes of 1.5 to 6.5 nm. Results from measuring mass show the ratio of the deposited mass to the incident volume of clusters differs for different sizes. A physical model of the particle deposition process is proposed and studied to explain the observed effect. According to modeling results, the focusing of particles does not change with size and is found to depend weakly on the initial velocity of the particles. It is concluded that the main reason for the above effect could be the difference between the coefficient of adhesion for particles of different sizes. It is proposed that this assumption be tested through additional experiments.
期刊介绍：
Physics of Atomic Nuclei is a journal that covers experimental and theoretical studies of nuclear physics: nuclear structure, spectra, and properties; radiation, fission, and nuclear reactions induced by photons, leptons, hadrons, and nuclei; fundamental interactions and symmetries; hadrons (with light, strange, charm, and bottom quarks); particle collisions at high and superhigh energies; gauge and unified quantum field theories, quark models, supersymmetry and supergravity, astrophysics and cosmology.
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