Super-resolution laser machining

IF 14 1区工程技术 Q1 ENGINEERING, MANUFACTURING

International Journal of Machine Tools & Manufacture Pub Date : 2025-02-01 DOI:10.1016/j.ijmachtools.2025.104246

Jiaxu Huang, Kang Xu, Shaolin Xu

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Abstract

Super-resolution laser machining represents a cutting-edge advancement in precision manufacturing, striving to approach or even exceed the optical diffraction limit to produce structures with exceptionally fine feature sizes, minimal heat-affected zones, and intricate freeform patterns. The present paper provides an overview of two principal approaches developed to achieve super-resolution: one is reducing the diffraction limit through the adoption of shorter laser wavelengths or advanced focusing techniques, and the other is surpassing the diffraction limit by advanced manipulation of the laser and its interactions with materials. With a deep investigation of the principles of these super-resolution laser machining methods, the review mainly explores the recent advancements in laser characteristics manipulation, materials innovation, and the integration of adaptive optics, high-speed laser scanning equipment, and feedback systems, all of which aim at enhancing machining resolution and broadening its applicability. Focusing on research frontiers and industrial applications, we also critically discussed future directions, potential problems, and possible solutions to smaller structure manufacturing regarding the light source, optical system, laser-matter interactions, and the surface evaluation methods. It also highlights the prospects for super-resolution laser machining, emphasizing its potential to transform precision manufacturing across industries.

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来源期刊

International Journal of Machine Tools & Manufacture 工程技术-工程：机械

CiteScore

25.70

自引率

10.00%

发文量

审稿时长

18 days

期刊介绍： The International Journal of Machine Tools and Manufacture is dedicated to advancing scientific comprehension of the fundamental mechanics involved in processes and machines utilized in the manufacturing of engineering components. While the primary focus is on metals, the journal also explores applications in composites, ceramics, and other structural or functional materials. The coverage includes a diverse range of topics: - Essential mechanics of processes involving material removal, accretion, and deformation, encompassing solid, semi-solid, or particulate forms. - Significant scientific advancements in existing or new processes and machines. - In-depth characterization of workpiece materials (structure/surfaces) through advanced techniques (e.g., SEM, EDS, TEM, EBSD, AES, Raman spectroscopy) to unveil new phenomenological aspects governing manufacturing processes. - Tool design, utilization, and comprehensive studies of failure mechanisms. - Innovative concepts of machine tools, fixtures, and tool holders supported by modeling and demonstrations relevant to manufacturing processes within the journal's scope. - Novel scientific contributions exploring interactions between the machine tool, control system, software design, and processes. - Studies elucidating specific mechanisms governing niche processes (e.g., ultra-high precision, nano/atomic level manufacturing with either mechanical or non-mechanical "tools"). - Innovative approaches, underpinned by thorough scientific analysis, addressing emerging or breakthrough processes (e.g., bio-inspired manufacturing) and/or applications (e.g., ultra-high precision optics).