Nathaniel S. McIlwaine, Nestor O. Marquez Rios, Eva Zurek, Donald W. Brenner, William G. Fahrenholtz, Stefano Curtarolo, Douglas E. Wolfe, Jon-Paul Maria
{"title":"Bipolar HiPIMS kick-pulse for high hardness in high-entropy boride thin films","authors":"Nathaniel S. McIlwaine, Nestor O. Marquez Rios, Eva Zurek, Donald W. Brenner, William G. Fahrenholtz, Stefano Curtarolo, Douglas E. Wolfe, Jon-Paul Maria","doi":"10.1111/jace.20257","DOIUrl":null,"url":null,"abstract":"<p>We report a microhardness indentation study for multicomponent refractory metal boride thin films that belong to the family of high-entropy ceramics exhibiting superior hardness and high temperature properties. We focus on the nominally equimolar composition (Ti<sub>0.2</sub>Zr<sub>0.2</sub>Hf<sub>0.2</sub>Nb<sub>0.2</sub>Ta<sub>0.2</sub>)B<sub>2</sub>, which we refer to as HEB3, on <i>c</i>-plane sapphire substrates. Thin films are prepared using bipolar high power impulse magnetron sputtering (HiPIMS), where the positive kick pulse is optimized to produce films with high density, high crystallinity, and a microstructure that is isometric in nature as revealed by cross-sectional fracture surface imaging, X-ray diffraction, and X-ray reflectometry. Low-load Knoop indentation is used to measure microhardness. We find strong trends linking kick-pulse magnitude, microstructure uniformity, high density, and Knoop hardness. Optimized conditions can produce films with low-load Knoop hardness exceeding 30 GPa. To validate these trends, we present a rigorous indent characterization campaign and discussion considering possible artifacts from roughness, thickness, and indent loading. The key finding of our study is the ability of engineering bombardment by using a low duty-cycle pulsed plasma to manipulate crystal structure without sacrificing crystallinity, and in turn boost material hardness.</p>","PeriodicalId":200,"journal":{"name":"Journal of the American Ceramic Society","volume":"108 3","pages":""},"PeriodicalIF":3.5000,"publicationDate":"2024-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1111/jace.20257","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the American Ceramic Society","FirstCategoryId":"88","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1111/jace.20257","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}
引用次数: 0
Abstract
We report a microhardness indentation study for multicomponent refractory metal boride thin films that belong to the family of high-entropy ceramics exhibiting superior hardness and high temperature properties. We focus on the nominally equimolar composition (Ti0.2Zr0.2Hf0.2Nb0.2Ta0.2)B2, which we refer to as HEB3, on c-plane sapphire substrates. Thin films are prepared using bipolar high power impulse magnetron sputtering (HiPIMS), where the positive kick pulse is optimized to produce films with high density, high crystallinity, and a microstructure that is isometric in nature as revealed by cross-sectional fracture surface imaging, X-ray diffraction, and X-ray reflectometry. Low-load Knoop indentation is used to measure microhardness. We find strong trends linking kick-pulse magnitude, microstructure uniformity, high density, and Knoop hardness. Optimized conditions can produce films with low-load Knoop hardness exceeding 30 GPa. To validate these trends, we present a rigorous indent characterization campaign and discussion considering possible artifacts from roughness, thickness, and indent loading. The key finding of our study is the ability of engineering bombardment by using a low duty-cycle pulsed plasma to manipulate crystal structure without sacrificing crystallinity, and in turn boost material hardness.
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The Journal of the American Ceramic Society contains records of original research that provide insight into or describe the science of ceramic and glass materials and composites based on ceramics and glasses. These papers include reports on discovery, characterization, and analysis of new inorganic, non-metallic materials; synthesis methods; phase relationships; processing approaches; microstructure-property relationships; and functionalities. Of great interest are works that support understanding founded on fundamental principles using experimental, theoretical, or computational methods or combinations of those approaches. All the published papers must be of enduring value and relevant to the science of ceramics and glasses or composites based on those materials.
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