3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror

IF 3.4 3区计算机科学 Q2 COMPUTER SCIENCE, INFORMATION SYSTEMS

IEEE Access Pub Date : 2025-01-27 DOI:10.1109/ACCESS.2025.3534847

Andrius Čeponis;Dalius Mažeika;Regimantas Bareikis

{"title":"3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror","authors":"Andrius Čeponis;Dalius Mažeika;Regimantas Bareikis","doi":"10.1109/ACCESS.2025.3534847","DOIUrl":null,"url":null,"abstract":"Article introduces a novel 3-DOF piezoelectric actuator designed to achieve the high-precision angular motion of a spherical rotor and an optical mirror around three axes. The actuator consists of three interlinked piezoelectric bimorph plates arranged in a low-profile triangular structure. Each piezoelectric plate contains a cylindrical contact that is used to transfer the vibrations to induce the angular motion of the rotor. The actuator has a low profile and is mounted on a printed circuit board (PCB), enhancing its structural integrity. The actuator occupies a footprint of 986 mm2 and, including the rotor, weighs 35.5 g. The actuator operation is based on the inertial stick-slip principle, using the first and second out-of-plane bending modes of the bimorph plates. Simultaneous excitation of the second vibration mode of all three bimorph plates produces angular motion of the rotor around the vertical axis. In contrast, the excitation of the first vibration mode of the individual plate enables angular motion around one of the horizontal axes. Numerical analysis identified the vibration modes, resonant frequencies, and mechanical and electromechanical characteristics of the actuator, leading to design optimization of clamping beams and contact locations on the bimorph plates. Experimental measurements revealed that the maximum rotation speeds are 363.7 RPM around the vertical axis and 129.1 RPM around the horizontal axis. Maximum torques of 218.2 mN/m and 159.7 mN/m were achieved around the vertical and horizontal axes, respectively, when the actuator is driven at 200 V<inline-formula> <tex-math>$_{\\mathrm {p-p}}$ </tex-math></inline-formula>. The actuator demonstrated angular resolutions of 2.47 mrad and 1.033 mrad for the vertical and horizontal axes, respectively.","PeriodicalId":13079,"journal":{"name":"IEEE Access","volume":"13 ","pages":"20025-20039"},"PeriodicalIF":3.4000,"publicationDate":"2025-01-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10855440","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Access","FirstCategoryId":"94","ListUrlMain":"https://ieeexplore.ieee.org/document/10855440/","RegionNum":3,"RegionCategory":"计算机科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"COMPUTER SCIENCE, INFORMATION SYSTEMS","Score":null,"Total":0}

引用次数: 0

Abstract

Article introduces a novel 3-DOF piezoelectric actuator designed to achieve the high-precision angular motion of a spherical rotor and an optical mirror around three axes. The actuator consists of three interlinked piezoelectric bimorph plates arranged in a low-profile triangular structure. Each piezoelectric plate contains a cylindrical contact that is used to transfer the vibrations to induce the angular motion of the rotor. The actuator has a low profile and is mounted on a printed circuit board (PCB), enhancing its structural integrity. The actuator occupies a footprint of 986 mm2 and, including the rotor, weighs 35.5 g. The actuator operation is based on the inertial stick-slip principle, using the first and second out-of-plane bending modes of the bimorph plates. Simultaneous excitation of the second vibration mode of all three bimorph plates produces angular motion of the rotor around the vertical axis. In contrast, the excitation of the first vibration mode of the individual plate enables angular motion around one of the horizontal axes. Numerical analysis identified the vibration modes, resonant frequencies, and mechanical and electromechanical characteristics of the actuator, leading to design optimization of clamping beams and contact locations on the bimorph plates. Experimental measurements revealed that the maximum rotation speeds are 363.7 RPM around the vertical axis and 129.1 RPM around the horizontal axis. Maximum torques of 218.2 mN/m and 159.7 mN/m were achieved around the vertical and horizontal axes, respectively, when the actuator is driven at 200 V

$_{\mathrm {p-p}}$

. The actuator demonstrated angular resolutions of 2.47 mrad and 1.033 mrad for the vertical and horizontal axes, respectively.

查看原文本刊更多论文

求助全文

约1分钟内获得全文求助全文

来源期刊

IEEE Access COMPUTER SCIENCE, INFORMATION SYSTEMSENGIN-ENGINEERING, ELECTRICAL & ELECTRONIC

CiteScore

9.80

自引率

7.70%

发文量

6673

审稿时长

6 weeks

期刊介绍： IEEE Access® is a multidisciplinary, open access (OA), applications-oriented, all-electronic archival journal that continuously presents the results of original research or development across all of IEEE''s fields of interest. IEEE Access will publish articles that are of high interest to readers, original, technically correct, and clearly presented. Supported by author publication charges (APC), its hallmarks are a rapid peer review and publication process with open access to all readers. Unlike IEEE''s traditional Transactions or Journals, reviews are "binary", in that reviewers will either Accept or Reject an article in the form it is submitted in order to achieve rapid turnaround. Especially encouraged are submissions on: Multidisciplinary topics, or applications-oriented articles and negative results that do not fit within the scope of IEEE''s traditional journals. Practical articles discussing new experiments or measurement techniques, interesting solutions to engineering. Development of new or improved fabrication or manufacturing techniques. Reviews or survey articles of new or evolving fields oriented to assist others in understanding the new area.