Using reduced sericin as a green resist for precise pattern fabrication via water-based lithography

IF 9.4 1区 化学 Q1 CHEMISTRY, PHYSICAL
Dong Wang , Xiaoyong Zhao , Yajing Zhou , Changqing Fang , Xing Zhou , Jingjing Deng , Lu Li , Wanqing Lei , Jian Su , Yingwei Huang
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引用次数: 0

Abstract

The use of toxic resists and complex procedures has impeded the resolution and quality of micro/nanofabrication on virtually arbitrary substrates via photolithography. To fabricate a precise and high-resolution pattern, a sericin nanofilm-based coating was developed by reducing disulfide bonds and subsequently assembling sericin protein. Upon exposure to ultraviolet (UV) light, intermolecular amide bonds in sericin are cleaved through the action of a reducing agent, allowing the reduced sericin (rSer) coating to exhibit the functional ability to generate diverse geometric micro/nanopatterns through photomask-governed photolithography. The rSer film serves as a platform for the encapsulation of fluorescent molecules, enabling fluorescent micropatterns applicable in anti-counterfeiting and encryption. In addition, the patterned rSer nanofilms support biocompatible cell proliferation. With their excellent chemical stability, high-resolution geometric patterns can be transferred onto silicon substrates through chemical etching, resulting in periodic chemical etching patterns that display structural colours. Inspired by the micro/nanostructures of lotus leaves, elliptical microstructures exhibit superhydrophobic behaviour, highlighting the versatility of the rSer film for applications in semiconductors, anti-counterfeiting, smart displays, and superhydrophobic coatings.

Abstract Image

利用还原丝胶作为绿色抗蚀剂,通过水基光刻进行精确的图案制作。
使用有毒的抗蚀剂和复杂的工艺阻碍了通过光刻技术在几乎任意基材上进行微/纳米加工的分辨率和质量。为了制造精确和高分辨率的图案,通过减少二硫键并随后组装丝胶蛋白,开发了基于丝胶蛋白纳米膜的涂层。暴露于紫外线(UV)光下,丝胶中的分子间酰胺键通过还原剂的作用被切割,使还原丝胶(rSer)涂层通过光掩膜控制的光刻技术显示出生成各种几何微/纳米图案的功能能力。rSer薄膜作为荧光分子封装的平台,使荧光微模式适用于防伪和加密。此外,图案化的rSer纳米膜支持生物相容性细胞增殖。由于具有优异的化学稳定性,高分辨率的几何图案可以通过化学蚀刻转移到硅衬底上,从而产生显示结构颜色的周期性化学蚀刻图案。受荷叶的微/纳米结构的启发,椭圆微结构表现出超疏水行为,突出了rSer薄膜在半导体、防伪、智能显示器和超疏水涂层中的应用的多功能性。
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来源期刊
CiteScore
16.10
自引率
7.10%
发文量
2568
审稿时长
2 months
期刊介绍: The Journal of Colloid and Interface Science publishes original research findings on the fundamental principles of colloid and interface science, as well as innovative applications in various fields. The criteria for publication include impact, quality, novelty, and originality. Emphasis: The journal emphasizes fundamental scientific innovation within the following categories: A.Colloidal Materials and Nanomaterials B.Soft Colloidal and Self-Assembly Systems C.Adsorption, Catalysis, and Electrochemistry D.Interfacial Processes, Capillarity, and Wetting E.Biomaterials and Nanomedicine F.Energy Conversion and Storage, and Environmental Technologies
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