Micro-zone cutting temperature measurement using a nitrogen-extracted boron and hydrogen co-doped diamond tool for ultra-precision machining

IF 14 1区工程技术 Q1 ENGINEERING, MANUFACTURING

International Journal of Machine Tools & Manufacture Pub Date : 2025-02-01 DOI:10.1016/j.ijmachtools.2024.104244

Shiquan Liu, Liang An, Hui Li, Kaiyang Xia, Mao Peng, Zhongwei Li, Bing-Feng Ju, Yuan-Liu Chen

{"title":"Micro-zone cutting temperature measurement using a nitrogen-extracted boron and hydrogen co-doped diamond tool for ultra-precision machining","authors":"Shiquan Liu, Liang An, Hui Li, Kaiyang Xia, Mao Peng, Zhongwei Li, Bing-Feng Ju, Yuan-Liu Chen","doi":"10.1016/j.ijmachtools.2024.104244","DOIUrl":null,"url":null,"abstract":"<div><div>Accurate measurement of the cutting temperature is essential for monitoring the cutting state and ensuring a reliable cutting process. In ultra-precision machining, directly measuring the temperature in the micro/nano-scale cutting zones poses substantial challenges. In this study, a nitrogen-extracted boron and hydrogen co-doped diamond tool was proposed. By transitioning into a p-type semiconductor, the diamond tool manifests heat-sensitive characteristics, enabling to sense the cutting temperature. The inherent orientation-dependent behaviour of boron doping in diamond tools, particularly notable in the (100) orientation, was suppressed through removal of nitrogen from the lattice. The lattice distortions induced by heavy boron doping after nitrogen removal in (111)-oriented diamond were significantly mitigated by co-doping with boron and hydrogen. This approach enhanced the crystal quality and semiconductor electrical properties of the diamond tools, which are crucial for accurate measurement of the cutting temperature. Compared with boron-doped diamond tools, the nitrogen-extracted boron and hydrogen co-doped diamond tool exhibited superior sensitivity and an extended range of temperature sensing. The diamond tool was employed for cutting temperature measurements during the micro-scale depth-graded turning of copper and titanium alloys, as well as the nano-scale progressive scratching of silicon. Experiments demonstrated the tool's capabilities for in-process monitoring of cutting states in micro zones, along with high-sensitivity detection of micro/nano-scale surface morphologies and characteristics during ultra-precision machining. The innovation of temperature-sensing diamond tools not only achieves accurate measurement of temperature in micro/nano-scale cutting zones during ultra-precision machining, but also provides an effective approach for in-process state characterisation for advanced manufacturing.</div></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"205 ","pages":"Article 104244"},"PeriodicalIF":14.0000,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Machine Tools & Manufacture","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0890695524001305","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}

引用次数: 0

Abstract

Accurate measurement of the cutting temperature is essential for monitoring the cutting state and ensuring a reliable cutting process. In ultra-precision machining, directly measuring the temperature in the micro/nano-scale cutting zones poses substantial challenges. In this study, a nitrogen-extracted boron and hydrogen co-doped diamond tool was proposed. By transitioning into a p-type semiconductor, the diamond tool manifests heat-sensitive characteristics, enabling to sense the cutting temperature. The inherent orientation-dependent behaviour of boron doping in diamond tools, particularly notable in the (100) orientation, was suppressed through removal of nitrogen from the lattice. The lattice distortions induced by heavy boron doping after nitrogen removal in (111)-oriented diamond were significantly mitigated by co-doping with boron and hydrogen. This approach enhanced the crystal quality and semiconductor electrical properties of the diamond tools, which are crucial for accurate measurement of the cutting temperature. Compared with boron-doped diamond tools, the nitrogen-extracted boron and hydrogen co-doped diamond tool exhibited superior sensitivity and an extended range of temperature sensing. The diamond tool was employed for cutting temperature measurements during the micro-scale depth-graded turning of copper and titanium alloys, as well as the nano-scale progressive scratching of silicon. Experiments demonstrated the tool's capabilities for in-process monitoring of cutting states in micro zones, along with high-sensitivity detection of micro/nano-scale surface morphologies and characteristics during ultra-precision machining. The innovation of temperature-sensing diamond tools not only achieves accurate measurement of temperature in micro/nano-scale cutting zones during ultra-precision machining, but also provides an effective approach for in-process state characterisation for advanced manufacturing.

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利用氮萃取硼氢共掺杂金刚石刀具进行超精密加工微区切削温度测量

准确测量切削温度对于监测切削状态和确保可靠的切削过程至关重要。在超精密加工中，直接测量微/纳米切削区域的温度是一个巨大的挑战。本研究提出了一种氮提硼氢共掺杂金刚石刀具。通过转变为p型半导体，金刚石工具表现出热敏特性，能够感知切割温度。金刚石工具中硼掺杂固有的取向依赖行为，特别是（100）取向，通过从晶格中去除氮而被抑制。硼和氢的共掺杂能显著减轻（111）取向金刚石脱氮后重硼掺杂引起的晶格畸变。这种方法提高了金刚石工具的晶体质量和半导体电学性能，这对精确测量切削温度至关重要。与硼掺杂金刚石工具相比，氮萃取硼和氢共掺杂金刚石工具具有更高的灵敏度和更大的温度传感范围。利用金刚石刀具测量了铜和钛合金的微尺度深度梯度车削和硅的纳米尺度渐进划痕的切削温度。实验证明，该工具能够在过程中监测微区域的切削状态，以及在超精密加工过程中对微/纳米尺度表面形貌和特征的高灵敏度检测。金刚石测温工具的创新不仅实现了超精密加工过程中微纳米尺度切削区域温度的精确测量，而且为先进制造提供了一种有效的过程状态表征方法。

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来源期刊

International Journal of Machine Tools & Manufacture 工程技术-工程：机械

CiteScore

25.70

自引率

10.00%

发文量

审稿时长

18 days

期刊介绍： The International Journal of Machine Tools and Manufacture is dedicated to advancing scientific comprehension of the fundamental mechanics involved in processes and machines utilized in the manufacturing of engineering components. While the primary focus is on metals, the journal also explores applications in composites, ceramics, and other structural or functional materials. The coverage includes a diverse range of topics: - Essential mechanics of processes involving material removal, accretion, and deformation, encompassing solid, semi-solid, or particulate forms. - Significant scientific advancements in existing or new processes and machines. - In-depth characterization of workpiece materials (structure/surfaces) through advanced techniques (e.g., SEM, EDS, TEM, EBSD, AES, Raman spectroscopy) to unveil new phenomenological aspects governing manufacturing processes. - Tool design, utilization, and comprehensive studies of failure mechanisms. - Innovative concepts of machine tools, fixtures, and tool holders supported by modeling and demonstrations relevant to manufacturing processes within the journal's scope. - Novel scientific contributions exploring interactions between the machine tool, control system, software design, and processes. - Studies elucidating specific mechanisms governing niche processes (e.g., ultra-high precision, nano/atomic level manufacturing with either mechanical or non-mechanical "tools"). - Innovative approaches, underpinned by thorough scientific analysis, addressing emerging or breakthrough processes (e.g., bio-inspired manufacturing) and/or applications (e.g., ultra-high precision optics).