Optimization of carbon transport and growth rates in top-seeded solution growth of Al-doped SiC

IF 2.6 3区 化学 Q2 CHEMISTRY, MULTIDISCIPLINARY
CrystEngComm Pub Date : 2024-11-21 DOI:10.1039/D4CE00931B
Zhouyu Tong, Xuefeng Han, Yuanchao Huang, Binjie Xu, Yanwei Yang, Deren Yang and Xiaodong Pi
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Abstract

The top-seeded solution growth (TSSG) method is an emerging technique for the production of silicon carbide (SiC). Due to its advantage of lower growth temperature compared to the physical vapor transport method, it holds significant potential in the preparation of Al-doped SiC. In this study, a global numerical model calculating heat and mass transfer was established to investigate the impact of solution radius and height, coil position, and rotational speed of the seed crystal on the flow pattern and carbon transport. The results indicated that a meticulous determination of these growth parameters could enhance both carbon transport and growth rate. Furthermore, abundant transient calculation results were utilized to train back-propagation (BP) neural networks to extract the correlation between growth parameters, growth rate, and Al concentration. The optimal parameters were ultimately obtained using the non-dominated sorting genetic algorithm (NSGA-II). The Al concentration calculated in the solution under the optimal growth conditions demonstrated that the evaporation of Al was sufficiently low to satisfy the p-type doping requirement. This study provides valuable insights for the future development of a TSSG system tailored for the rapid growth of Al-doped SiC.

Abstract Image

优化掺铝碳化硅顶籽溶液生长过程中的碳传输和生长速率
顶种溶液生长法(TSSG)是一种新兴的碳化硅(SiC)生产技术。由于其生长温度较物理气相输运法低的优点,在制备掺al SiC方面具有很大的潜力。本研究建立了一个计算传热传质的全球数值模型,研究了溶液半径和高度、线圈位置和种子晶体转速对流动模式和碳输运的影响。结果表明,仔细确定这些生长参数可以提高碳运输和生长速度。此外,利用丰富的瞬态计算结果训练BP神经网络,提取生长参数、生长速率和Al浓度之间的相关性。最终采用非支配排序遗传算法(NSGA-II)获得最优参数。在最佳生长条件下计算的溶液中Al浓度表明,Al的蒸发足够低,可以满足p型掺杂的要求。该研究为未来开发适合al掺杂SiC快速生长的TSSG系统提供了有价值的见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
CrystEngComm
CrystEngComm 化学-化学综合
CiteScore
5.50
自引率
9.70%
发文量
747
审稿时长
1.7 months
期刊介绍: Design and understanding of solid-state and crystalline materials
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