Enhancing subsurface imaging in ultrasonic atomic force microscopy with optimized contact force.

Abstract

Ultrasonic atomic force microscopy (UAFM) is a powerful nondestructive subsurface imaging tool that is widely used to inspect material defects and analyze biological cells. The contrast in UAFM images, which is crucial for subsurface imaging quality, is directly influenced by the contact force between the probe and material. This contact force affects the subsurface contrast by influencing the propagation of the stress field from the vibrating probe into the material. Therefore, optimizing the contact force is essential for achieving superior subsurface contrast with better resolution and greater detectable depth. This paper proposes a model for determining the optimal contact force for high-contrast, high-resolution subsurface imaging. The model was designed to improve UAFM imaging across samples with a wide range of Young's moduli, from tens to hundreds of GPa. The use of this model resulted in significant improvements to imaging quality, with a detectable depth exceeding 337.7 nm and lateral resolution below 56.9 nm. Hence, this model demonstrates better results than experiments conducted under arbitrary contact forces. This study provides a pathway for optimizing subsurface imaging and delivering enhanced contrast, higher resolution, and greater detectable depth. Consequently, the results of this study contribute to the advancement of the capabilities of subsurface imaging techniques.