Effect of the Water Pulse Duration on the Stoichiometry of HfOx Films Obtained from Tetrakis(Dimethylamino)Hafnium

IF 1.2 4区化学 Q4 CHEMISTRY, INORGANIC & NUCLEAR

Journal of Structural Chemistry Pub Date : 2024-11-11 DOI:10.1134/S0022476624100184

K. I. Litvinova, V. S. Polomskikh, A. V. Goryachev, A. A. Shibalova, G. A. Rudakov

引用次数: 0

Abstract

We present the results of studying HfO_x films formed from tetrakis(dimethylamino)hafnium with different times of water supply pulses. The stoichiometry of the samples obtained is estimated by spectral ellipsometry and Auger electron spectroscopy. It is shown that an increase in the water supply duration promotes an increase in the x value in the HfO_x layer. When the time of water supply pulses varies from 10 ms to 1000 ms, x values ranging from 1.76 to 1.84 are obtained. A method based on the refractive index is proposed to estimate the stoichiometry of HfO_x layers.

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水脉冲持续时间对四(二甲基氨基)铪薄膜化学计量学的影响

我们介绍了在不同供水脉冲时间下由四(二甲基氨基)铪形成的氧化铪薄膜的研究结果。我们通过光谱椭偏仪和欧杰电子能谱来估算所获得样品的化学计量。结果表明，供水时间的延长会促进氧化铪层中 x 值的增加。当供水脉冲时间从 10 毫秒到 1000 毫秒不等时，x 值在 1.76 到 1.84 之间。我们提出了一种基于折射率的方法来估算氧化铪层的化学计量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Structural Chemistry 化学-无机化学与核化学

CiteScore

1.60

自引率

12.50%

发文量

142

审稿时长

8.3 months

期刊介绍： Journal is an interdisciplinary publication covering all aspects of structural chemistry, including the theory of molecular structure and chemical bond; the use of physical methods to study the electronic and spatial structure of chemical species; structural features of liquids, solutions, surfaces, supramolecular systems, nano- and solid materials; and the crystal structure of solids.