Structure and Properties of the SiO2–Cr2O3 Coatings Obtained by Pulsed Magnetron Sputtering onto a ZrO2 Ceramic Substrate

IF 0.5 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Inorganic Materials: Applied Research Pub Date : 2024-10-09 DOI:10.1134/S2075113324700904

R. S. Nebogatikov, S. Ya. Pichidze

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Abstract

A technique for obtaining SiO₂–Cr₂O₃ coatings on a Y-TZP (ZrO₂ stabilized by Y₂O₃) zirconia ceramic substrate is proposed. The coating has been created in three stages: (i) forming a SiO₂ adhesion layer by applying a 5% solution of 3-aminopropyltriethoxysilane alcohol onto the ceramic substrate surface with the subsequent heat treatment at 450 ± 5°C for 30 min, (ii) deposition of Cr (purity 99.9%) by pulse magnetron sputtering onto the prepared ceramic substrate with the formed SiO₂ layer, and (iii) diffusion oxidation of Cr deposited onto the ceramic substrate to Cr₂O₃ in a muffle furnace at a temperature of 450 ± 5°C for 30 min. The mechanical characteristics of the coating have been examined depending on the preliminary and finishing operations (abrasive-jet machining and polishing). Samples with the coating of a submicron thickness of 150 ± 20 nm having the lamellar nanostructure, an open porosity value of 1.3%, a microhardness of 2000 HV, roughness Ra of 0.32–0.63, a friction coefficient of 0.175, and an abrasion resistance against loadings 184% higher than for pure zirconia ceramics have been obtained.

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通过脉冲磁控溅射在 ZrO2 陶瓷基底上获得的 SiO2-Cr2O3 涂层的结构和特性

本文提出了一种在 Y-TZP（由 Y2O3 稳定的二氧化锆）氧化锆陶瓷基底上获得 SiO2-Cr2O3 涂层的技术。涂层的形成分为三个阶段：(i) 通过在陶瓷基底表面涂抹 5% 的 3-aminopropyltriethoxysilane 醇溶液形成 SiO2 粘附层，随后在 450 ± 5°C 下热处理 30 分钟；(ii) 通过脉冲磁控溅射沉积铬（纯度为 99.(iii) 在马弗炉中将沉积在陶瓷基底上的 Cr 在 450 ± 5°C 的温度下扩散氧化 30 分钟，生成 Cr2O3。涂层的机械特性根据初步加工和精加工（喷砂机加工和抛光）的不同进行了检验。涂层厚度为 150 ± 20 nm 的亚微米级样品具有片状纳米结构，开放孔隙率为 1.3%，显微硬度为 2000 HV，粗糙度 Ra 为 0.32-0.63，摩擦系数为 0.175，耐磨性比纯氧化锆陶瓷高出 184%。

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来源期刊

Inorganic Materials: Applied Research Engineering-Engineering (all)

CiteScore

0.90

自引率

0.00%

发文量

199

期刊介绍： Inorganic Materials: Applied Research contains translations of research articles devoted to applied aspects of inorganic materials. Best articles are selected from four Russian periodicals: Materialovedenie, Perspektivnye Materialy, Fizika i Khimiya Obrabotki Materialov, and Voprosy Materialovedeniya and translated into English. The journal reports recent achievements in materials science: physical and chemical bases of materials science; effects of synergism in composite materials; computer simulations; creation of new materials (including carbon-based materials and ceramics, semiconductors, superconductors, composite materials, polymers, materials for nuclear engineering, materials for aircraft and space engineering, materials for quantum electronics, materials for electronics and optoelectronics, materials for nuclear and thermonuclear power engineering, radiation-hardened materials, materials for use in medicine, etc.); analytical techniques; structure–property relationships; nanostructures and nanotechnologies; advanced technologies; use of hydrogen in structural materials; and economic and environmental issues. The journal also considers engineering issues of materials processing with plasma, high-gradient crystallization, laser technology, and ultrasonic technology. Currently the journal does not accept direct submissions, but submissions to one of the source journals is possible.