A new technique for electrochemical self-discharge machining of macro-sized hole in the glass using an integrated tool electrode

IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL
Zhixiang Zou , Kangcheung Chan , Yukui Wang , Ting Huang , Taiman Yue , Zhongning Guo , Jiangwen Liu
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Abstract

Owing to stray electrochemical discharge effects, it is still a significant challenge to obtain high machining quality and efficiency in conventional electrochemical discharge machining (ECDM) of macro-sized holes (>1 mm) in glass. Thus, in this study, an electrochemical self-discharge machining (EC-SDM) technique using an integrated tool electrode is proposed. In the new design, the tool anode and cathode are configured coaxially in an integral manner. The simulation and high-speed camera observation results indicated that the electrochemical discharges were more concentrated at the tool electrode end when using the EC-SDM. Thus, the stray electrochemical discharge capacity decreased significantly. With the formation of a dense oxidized layer on the anode electrode surface, the EC-SDM technique is frequently interrupted by DC pulse; however, the discharge is continuous under bipolar pulse conditions. Furthermore, the EC-SDM technique can utilize the advantage of the hydrogen-oxygen gas mixture generated at the integrated electrode end for combustion close to the workpiece surface, thus increasing machining efficiency. When compared with the conventional ECDM, the machining efficiency increased by 6.09 times, and the entrance heat affected zone (HAZ) reduced by 54.05 %. A macro-sized hole (entrance diameter of 1303 μm) with depth of 1520 μm, minimal thermal and mechanical damage was successfully obtained in the glass substrate by using the EC-SDM technique. The results illustrate that employing the novel EC-SDM technique is a straightforward way to reduce stray electrochemical discharge and improve the machining performance of macro-sized glass holes. The potential of the EC-SDM technique for MEMS applications was also highlighted.

使用集成工具电极在玻璃上加工大尺寸孔的电化学自放电加工新技术
由于杂散电化学放电效应,在传统的电化学放电加工(ECDM)中,要获得玻璃上大尺寸孔(1 毫米)的高加工质量和效率仍是一项重大挑战。因此,本研究提出了一种使用集成工具电极的电化学自放电加工(EC-SDM)技术。在新设计中,工具阳极和阴极以整体方式同轴配置。模拟和高速摄像观察结果表明,使用 EC-SDM 时,电化学放电更集中在刀具电极端。因此,杂散电化学放电能力明显下降。由于阳极电极表面形成了致密的氧化层,EC-SDM 技术经常会被直流脉冲中断;但在双极脉冲条件下,放电是连续的。此外,EC-SDM 技术还能利用集成电极端部产生的氢氧混合气体的优势,在靠近工件表面的地方进行燃烧,从而提高加工效率。与传统的 ECDM 相比,加工效率提高了 6.09 倍,入口热影响区(HAZ)减少了 54.05%。利用 EC-SDM 技术,成功地在玻璃基板上加工出了深度为 1520 μm、热损伤和机械损伤最小的大尺寸孔(入口直径为 1303 μm)。结果表明,采用新颖的 EC-SDM 技术是减少杂散电化学放电和提高大尺寸玻璃孔加工性能的直接方法。此外,EC-SDM 技术在微机电系统应用方面的潜力也得到了强调。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Journal of Materials Processing Technology
Journal of Materials Processing Technology 工程技术-材料科学:综合
CiteScore
12.60
自引率
4.80%
发文量
403
审稿时长
29 days
期刊介绍: The Journal of Materials Processing Technology covers the processing techniques used in manufacturing components from metals and other materials. The journal aims to publish full research papers of original, significant and rigorous work and so to contribute to increased production efficiency and improved component performance. Areas of interest to the journal include: • Casting, forming and machining • Additive processing and joining technologies • The evolution of material properties under the specific conditions met in manufacturing processes • Surface engineering when it relates specifically to a manufacturing process • Design and behavior of equipment and tools.
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