Novel screen-printed ceramic MEMS microhotplate for MOS sensors

IF 5.4 3区材料科学 Q2 CHEMISTRY, PHYSICAL

ACS Applied Energy Materials Pub Date : 2024-09-15 DOI:10.1016/j.sna.2024.115907

Oleg Kul , Alexey Vasiliev , Alexey Shaposhnik , Andrey Nikitin , Anna Dmitrieva , Alexandr Bolshakov , Zhifu Liu , Mingsheng Ma , Artem Mokrushin , Nikolay Simonenko , Elizaveta Simonenko

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Abstract

We developed a new approach to the fabrication of MEMS substrates for MOS gas sensors. This full screen-printing process is based on the application of sacrificial material, which is solid at the near-room temperature of printing and turns to powder after the firing of the elements of the sensor. Therefore, this sacrificial material can be removed from under the suspended elements of the MEMS structure in ultrasonic bath. The glass-ceramic MEMS is a cantilever structure equipped with a Pt-based microheater made of Pt resistive material with sheet resistance of about 4 Ohm/square fabricated using core-shell technology. It is located at the end edge of the cantilever and is isolated from the contacts to the sensing layer by glass-ceramic insulation. Screen-printing provides cheap fabrication, robustness and low power (∼120 mW@450°C) of the sensing element. The functionality of the microhotplate was checked using ZnO nanomaterial deposited by microextruder, it demonstrated high response and selectivity of ZnO material to NO₂ (response 41.6 at 200°C for 10 ppm).

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用于 MOS 传感器的新型丝网印刷陶瓷 MEMS 微热板

我们开发了一种用于制造 MOS 气体传感器 MEMS 基板的新方法。这种全丝网印刷工艺以牺牲材料的应用为基础，牺牲材料在接近室温的印刷温度下是固体，在传感器元件烧制后会变成粉末。因此，这种牺牲材料可以在超声波浴中从微机电系统结构的悬浮元件下面去除。玻璃陶瓷微机电系统是一种悬臂结构，配备了一个铂基微加热器，该加热器由铂电阻材料制成，片状电阻约为 4 欧姆/平方，采用核壳技术制造。它位于悬臂的端部边缘，并通过玻璃陶瓷绝缘层与传感层的触点隔离。丝网印刷技术使传感元件的制造成本低、坚固耐用且功耗低（∼120 mW@450°C）。使用微挤压机沉积的氧化锌纳米材料检验了微热板的功能，结果表明氧化锌材料对二氧化氮具有高响应和高选择性（在 200°C 条件下，10 ppm 的响应为 41.6）。

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来源期刊

ACS Applied Energy Materials Materials Science-Materials Chemistry

CiteScore

10.30

自引率

6.20%

发文量

1368

期刊介绍： ACS Applied Energy Materials is an interdisciplinary journal publishing original research covering all aspects of materials, engineering, chemistry, physics and biology relevant to energy conversion and storage. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important energy applications.