Control of a quasi-static MEMS Mirror for raster scanning projection applications

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2024-08-16 DOI:10.1080/15599612.2024.2386991

Riccardo Antonello, Roberto Oboe, Daniele D’Elia, Luca Molinari

引用次数: 0

Abstract

The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered b...

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控制准静态 MEMS 镜，用于光栅扫描投影应用

用于光栅扫描投影应用的准静态微镜的角运动通常会受到与高频共振模式触发的不期望振荡的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)