Methods for the Study and Control of Microplasma Processes in the Synthesis of Coatings

IF 1.1 4区物理与天体物理 Q4 PHYSICS, APPLIED

Technical Physics Pub Date : 2024-09-02 DOI:10.1134/s1063784224010274

A. I. Mamaev, V. A. Mamaeva, Yu. N. Bespalova

引用次数: 0

Abstract

The physical bases for determining the ignition and quenching potentials of microplasma discharges in solutions have been developed. Chronopotentiometric, chronoamperometric dependences on the conditions for obtaining coatings and the dependence of the time constant of the transient process on the voltage and duration of the process, as well as current–voltage dependences at the rates of rise and fall of the potential voltage from 10⁶ to 10⁸ V/s, are obtained. The developed method is applicable to control the process of deposition of microplasma non-metallic inorganic coatings and is the basis of the technique for in situ control of coating deposition.

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研究和控制涂层合成中微等离子体过程的方法

摘要确定溶液中微等离子体放电的点火和熄灭电位的物理基础已经开发出来。获得了获得涂层条件下的计时电位计和计时电流计依赖关系、瞬态过程时间常数对电压和过程持续时间的依赖关系，以及电位电压在 106 至 108 V/s 上升和下降速率下的电流-电压依赖关系。所开发的方法适用于控制微等离子体非金属无机涂层的沉积过程，是原位控制涂层沉积技术的基础。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Technical Physics 物理-物理：应用

CiteScore

1.30

自引率

14.30%

发文量

139

审稿时长

3-6 weeks

期刊介绍： Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.