Study on the Multi-Physical Field Simulation of the Double-Glow Plasma Alloying Process Parameters

Abstract

In order to study the coupling mechanism of the process parameters during the double-glow discharge process, and thus to enhance the theoretical study of double-glow plasma surface metallurgical technology, in this paper, a two-dimensional fluid model is established using COMSOL simulation software. The effects of key processing factors on the distribution of electrons and excited argon ions, potential and electron temperature in the coupling process of double-glow discharge were investigated. The results indicated that the electron density between the two electrode plates increases as the voltage difference increases. The optimal working pressure was kept between 0.14 Torr and 0.29 Torr. The optimal electrode spacing was between 15 mm and 30 mm and decreased with the increase in pressure. Compared with the actual plasma surface alloying process experiment, the simulation results were consistent with the experiments. The research can guide experiments by combining simulation and theory, and the predictability and accuracy of double-glow surface metallurgy technology have been improved.