Polarity of homoepitaxial ZnO films grown by Nd:YAG pulsed laser deposition

IF 2.7 3区物理与天体物理 Q2 PHYSICS, APPLIED

Journal of Applied Physics Pub Date : 2024-09-03 DOI:10.1063/5.0223495

Tatsuya Masuda, Toshihiro Sato, Mikk Lippmaa, Takuro Dazai, Norihiko Sekine, Iwao Hosako, Hideomi Koinuma, Ryota Takahashi

引用次数: 0

Abstract

We investigate the stability of the polar surface of ZnO films grown homoepitaxially on atomically flat ZnO (0001¯) O-face substrates by neodymium yttrium aluminum garnet (Nd:YAG) pulsed laser deposition (PLD). For films grown in the temperature range from 500 to 700 °C, ion scattering spectroscopy showed that the film surface termination was the same as the ZnO substrate. Even for a Mg0.2Zn0.8O/ZnO superlattice, no polarity reversal occurred, indicating that the ZnO (0001¯) O-face is highly stable, despite the film surface sputtering caused by the high kinetic energy of the PLD plume generated by the Nd:YAG laser.

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Nd:YAG 脉冲激光沉积法生长的同外延氧化锌薄膜的极性

我们研究了通过钕钇铝石榴石（Nd:YAG）脉冲激光沉积（PLD）技术在原子平的氧化锌（0001¯）O 面基底上同序长成的氧化锌薄膜极性表面的稳定性。对于在 500 至 700 °C 温度范围内生长的薄膜，离子散射光谱显示薄膜的表面终止与氧化锌基底相同。即使是 Mg0.2Zn0.8O/ZnO 超晶格，也没有发生极性反转，这表明 ZnO (0001¯) O 面高度稳定，尽管 Nd:YAG 激光产生的高动能脉冲激光沉积羽流会导致薄膜表面溅射。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Applied Physics 物理-物理：应用

CiteScore

5.40

自引率

9.40%

发文量

1534

审稿时长

2.3 months

期刊介绍： The Journal of Applied Physics (JAP) is an influential international journal publishing significant new experimental and theoretical results of applied physics research. Topics covered in JAP are diverse and reflect the most current applied physics research, including: Dielectrics, ferroelectrics, and multiferroics- Electrical discharges, plasmas, and plasma-surface interactions- Emerging, interdisciplinary, and other fields of applied physics- Magnetism, spintronics, and superconductivity- Organic-Inorganic systems, including organic electronics- Photonics, plasmonics, photovoltaics, lasers, optical materials, and phenomena- Physics of devices and sensors- Physics of materials, including electrical, thermal, mechanical and other properties- Physics of matter under extreme conditions- Physics of nanoscale and low-dimensional systems, including atomic and quantum phenomena- Physics of semiconductors- Soft matter, fluids, and biophysics- Thin films, interfaces, and surfaces