A capillary fiber-based liquid metal pressure sensor

IF 2.6 3区物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY

Physica Scripta Pub Date : 2024-09-09 DOI:10.1088/1402-4896/ad74b0

Xiao-Ping Zhou and Qi Zhang

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引用次数: 0

Abstract

The capillary fibers can easily be prefabricated in the factory, and their production cost is reduced. Moreover, the liquid metal fibers have the advantages of good integrity, excellent electrical conductivity, inherent stretchability, easy phase transition, and can be woven or knitted into smart fabrics. To solve the problems of the complex manufacture process and low integrity of lithographic sensors, capillary fibers replace the lithographic microfluidic channel to fill liquid metal to manufacture the pressure sensor in this paper. The prefabricated fiber is poured directly to produce the flexible chip. The steel shell is employed to increase the sensor’s measuring range and to enhance its overall performance. Compression experiments on the developed sensor are conducted, and pressure-resistance curves of the developed pressure sensor are obtained. The analytical solution of the pressure for the developed sensor is derived, and the analytical results are in good agreement with the experimental data. The cyclic loading experimental result shows that the measuring range of the chip is from 0 kPa to 1900 kPa with a full-scale output value of 1644 mΩ, linearity varying from 0.14 to 1.22 mΩ kPa−1, curve coincidence of 48.2%, repeatability of 2.77% and hysteresis of 5.26%. The measuring range of the developed pressure sensor is from 0 MPa to 20 MPa with a full-scale output value of 1046 mΩ, linearity ranging from 35.63 to 70.20 mΩ MPa−1, curve coincidence of 7.5%, repeatability of 2.35% and hysteresis of 4.53%. The comparison of performance indexes shows that the capillary fiber-based chip has good measurement performance, and the introduction of steel shell further improves the measurement performance.

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基于毛细纤维的液态金属压力传感器

毛细纤维可以很容易地在工厂中预制，降低了生产成本。此外，液态金属纤维还具有良好的完整性、优异的导电性、固有的拉伸性、易相变等优点，可编织或针织成智能织物。为了解决光刻传感器制造工艺复杂、完整性差等问题，本文采用毛细纤维代替光刻微流控通道填充液态金属来制造压力传感器。预制纤维直接浇注到柔性芯片中。钢壳的使用增加了传感器的测量范围，并提高了其整体性能。对开发的传感器进行了压缩实验，并得到了开发的压力传感器的耐压曲线。得出了所开发传感器的压力解析解，解析结果与实验数据十分吻合。循环加载实验结果表明，芯片的测量范围为 0 kPa 至 1900 kPa，满刻度输出值为 1644 mΩ，线性范围为 0.14 至 1.22 mΩ kPa-1，曲线重合度为 48.2%，重复性为 2.77%，滞后为 5.26%。开发的压力传感器测量范围为 0 MPa 至 20 MPa，满量程输出值为 1046 mΩ，线性范围为 35.63 至 70.20 mΩ MPa-1，曲线重合度为 7.5%，重复性为 2.35%，滞后为 4.53%。性能指标对比表明，基于毛细纤维的芯片具有良好的测量性能，钢壳的引入进一步提高了测量性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Physica Scripta 物理-物理：综合

CiteScore

3.70

自引率

3.40%

发文量

782

审稿时长

4.5 months

期刊介绍： Physica Scripta is an international journal for original research in any branch of experimental and theoretical physics. Articles will be considered in any of the following topics, and interdisciplinary topics involving physics are also welcomed: -Atomic, molecular and optical physics- Plasma physics- Condensed matter physics- Mathematical physics- Astrophysics- High energy physics- Nuclear physics- Nonlinear physics. The journal aims to increase the visibility and accessibility of research to the wider physical sciences community. Articles on topics of broad interest are encouraged and submissions in more specialist fields should endeavour to include reference to the wider context of their research in the introduction.