Yong Jiang, Chenguang Liu, Chongliang Zou, Jian Liu
{"title":"Axial peak extraction in the measurement of subsurface structures with annular illumination confocal microscopy","authors":"Yong Jiang, Chenguang Liu, Chongliang Zou, Jian Liu","doi":"10.1088/2051-672x/ad6b3c","DOIUrl":null,"url":null,"abstract":"Three-dimensional dark-field confocal microscopy (DFCM) using annular illumination and complementary detection apertures is capable of detecting subsurface defects in ultra-precision optical components. In this study, a DFCM tuning algorithm for large apertures is proposed based on the sinc<sup>2</sup> tuning model. This algorithm provides a reliable and theoretically accurate method for extracting the axial position during the measurement of subsurface defects. The rationality and accuracy of this method are verified through simulations and experimental results.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"13 1","pages":""},"PeriodicalIF":2.0000,"publicationDate":"2024-08-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Topography: Metrology and Properties","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1088/2051-672x/ad6b3c","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
引用次数: 0
Abstract
Three-dimensional dark-field confocal microscopy (DFCM) using annular illumination and complementary detection apertures is capable of detecting subsurface defects in ultra-precision optical components. In this study, a DFCM tuning algorithm for large apertures is proposed based on the sinc2 tuning model. This algorithm provides a reliable and theoretically accurate method for extracting the axial position during the measurement of subsurface defects. The rationality and accuracy of this method are verified through simulations and experimental results.
期刊介绍:
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