A CMOS front-end circuit for capacitive sensors with zero adjustment

Abstract

A front-end circuit with measurement zero adjustment was designed using 180nm CMOS technology for capacitive sensors. A series-switched capacitor composed of capacitor under test and MOSFETs is controlled by a clock signal to convert capacitance to current. The minimum output current at fixed capacitance can be adjusted by applying different voltage to realize zero adjustment. The test shows that the output current has a monotonic linear relationship with the measured capacitance, with capacitance detection range reaches 50pF-3000pF and an output current range of 0.59mA-22.2mA. The maximum span of multiple measurements was lower than 8.37uA. The stable time is less than 23ms and sensitivity is 19.8uA/pF. This circuit is suitable for long-distance and wide-range capacitance detections.