{"title":"Rapid fabrication of grating of variable submicron line width based on digital micromirror devices collaborative modulation lithography","authors":"Jingya Zhang, Ningning Luo, Deyuan Chen","doi":"10.1117/1.oe.63.8.084102","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509903,"journal":{"name":"Optical Engineering","volume":"8 19","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.oe.63.8.084102","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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