{"title":"Optimization study of a probe chuck for semiconductor wafers using genetic algorithm and deep reinforcement learnings","authors":"Geuna Choi, Sheriff Abiodun Aodu, Il Seouk Park","doi":"10.1007/s12206-024-0734-4","DOIUrl":null,"url":null,"abstract":"<p>The probe chuck is an inspection device assessing the thermal durability of semiconductor wafers in various temperature environments before shipping. It is most important to ensure that the temperature of the chuck upper surface, on which the wafers are placed, is uniform. This study presents an axisymmetric chuck model to improve surface temperature uniformity in both radial and circumferential directions. The local distribution of the flow path height in the axisymmetric chuck was adjusted to make the chuck upper surface with a constant wall heat flux to simultaneously become as uniform temperature as possible. Three optimization algorithms, namely the genetic algorithm (GA), deep q-network (DQN), and actor-critic (AC) were applied. The optimized shape of the flow pathway, improved temperature uniformity, pressure drop, and local heat transfer coefficient profile by three different optimization algorithms are presented in detail. As a result, the surface temperature difference was significantly reduced from 7.137 K in the existing spiral model to 0.682 K. The optimal axisymmetric chuck could reduce surface temperature differences up to 90 % compared with the conventional spiral chuck.</p>","PeriodicalId":16235,"journal":{"name":"Journal of Mechanical Science and Technology","volume":"37 1","pages":""},"PeriodicalIF":1.5000,"publicationDate":"2024-08-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Mechanical Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s12206-024-0734-4","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
引用次数: 0
Abstract
The probe chuck is an inspection device assessing the thermal durability of semiconductor wafers in various temperature environments before shipping. It is most important to ensure that the temperature of the chuck upper surface, on which the wafers are placed, is uniform. This study presents an axisymmetric chuck model to improve surface temperature uniformity in both radial and circumferential directions. The local distribution of the flow path height in the axisymmetric chuck was adjusted to make the chuck upper surface with a constant wall heat flux to simultaneously become as uniform temperature as possible. Three optimization algorithms, namely the genetic algorithm (GA), deep q-network (DQN), and actor-critic (AC) were applied. The optimized shape of the flow pathway, improved temperature uniformity, pressure drop, and local heat transfer coefficient profile by three different optimization algorithms are presented in detail. As a result, the surface temperature difference was significantly reduced from 7.137 K in the existing spiral model to 0.682 K. The optimal axisymmetric chuck could reduce surface temperature differences up to 90 % compared with the conventional spiral chuck.
期刊介绍:
The aim of the Journal of Mechanical Science and Technology is to provide an international forum for the publication and dissemination of original work that contributes to the understanding of the main and related disciplines of mechanical engineering, either empirical or theoretical. The Journal covers the whole spectrum of mechanical engineering, which includes, but is not limited to, Materials and Design Engineering, Production Engineering and Fusion Technology, Dynamics, Vibration and Control, Thermal Engineering and Fluids Engineering.
Manuscripts may fall into several categories including full articles, solicited reviews or commentary, and unsolicited reviews or commentary related to the core of mechanical engineering.