Low-Cost High-Speed Fiber-Coupled Interferometer for Precise Surface Profilometry

Abstract

Due to their contactless and fast measuring capabilities, laser interferometers represent an interesting alternative to tactile stylus instruments for surface profilometry. In addition to these outstanding attributes, acquisition costs play a major role in industry, limiting the frequent use of optical profilometers, which are significantly more expensive than tactile profilometers. We present a low-cost laser distance-measuring interferometer featuring axial repeatability below 1 nm at acquisition rates of 38,000 height values per second. The sensor’s performance is validated on several surface standards, achieving lateral scan velocities up to 160 mm/s. Further to high scan velocities, the high acquisition rate enables improved measurement accuracy by averaging measured height values. For example, the standard deviation of 625 pm for repeated measurements can be reduced to 265 pm at the expense of the data rate. However, the sensor concept provides the potential for further improvements in data rate and measurement repeatability.