{"title":"Surface Profiling of Silicon Wafer Using Wavelength-Scanning Fizeau Interferometer and Gaussian Window Function","authors":"Juncheol Bae, Hwan Kim, Ju-Seob Jeon, Yangjin Kim","doi":"10.3795/ksme-a.2024.48.7.455","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":515905,"journal":{"name":"Transactions of the Korean Society of Mechanical Engineers - A","volume":"10 2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-07-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Transactions of the Korean Society of Mechanical Engineers - A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3795/ksme-a.2024.48.7.455","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}