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Surface Profiling of Silicon Wafer Using Wavelength-Scanning Fizeau Interferometer and Gaussian Window Function

Transactions of the Korean Society of Mechanical Engineers - A Pub Date : 2024-07-31 DOI:10.3795/ksme-a.2024.48.7.455
Juncheol Bae, Hwan Kim, Ju-Seob Jeon, Yangjin Kim
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Transactions of the Korean Society of Mechanical Engineers - A
Transactions of the Korean Society of Mechanical Engineers - A
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