Sputtering yield increase with fluence in low-energy argon plasma-tungsten interaction

IF 1.9 3区工程技术 Q1 NUCLEAR SCIENCE & TECHNOLOGY

Fusion Engineering and Design Pub Date : 2024-07-24 DOI:10.1016/j.fusengdes.2024.114607

Ki-Baek Roh , Myeong-Geon Lee , Heung Nam Han , Hyoung Chan Kim , Gon-Ho Kim

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Abstract

The increase of tungsten sputtering yield with fluence was investigated during plasma (≤100 eV) irradiation. This analysis focused on the combined effects of surface binding energy and surface morphology caused by Ar retention. As post-mortem analysis, Ar concentration was measured with SIMS (Secondary Ion Mass Spectroscopy) and TDS (Thermal Desorption Spectroscopy). The Ar concentration saturated at 21 % of W number density during the sputtering process. The corresponding change in surface morphology causes a change in the local ion incident angle, which leads to a sputtering yield increase of 10 %. The increased Ar concentration leads to a decrease in surface binding energy and a change in surface morphology which increases W sputtering yield from 0.02 to 0.03 by ion energy 80 eV. Over time, W sputtering yield reaches saturation as a function of saturated Ar concentration. This result implies that the synergistic role of Ar concentration and surface morphology on sputtering yield. This sputtering yield enhancement occurs more seriously in the realistic condition of plasma-facing materials that face low-energy plasma.

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低能氩等离子体与钨相互作用中溅射产率随通量增加而增加

在等离子体（≤100 eV）辐照期间，研究了钨溅射产率随通量的增加而增加的情况。分析的重点是氩气滞留造成的表面结合能和表面形貌的综合影响。作为死后分析，使用 SIMS（二次离子质谱）和 TDS（热解吸光谱）测量了氩浓度。在溅射过程中，氩浓度在 W 数密度的 21% 时达到饱和。表面形态的相应变化导致局部离子入射角发生变化，从而使溅射产率提高了 10%。氩浓度的增加导致表面结合能的降低和表面形态的变化，从而使离子能量为 80 eV 时的 W 溅射产率从 0.02 提高到 0.03。随着时间的推移，作为饱和氩浓度的函数，W 溅射产率达到饱和。这一结果表明，氩气浓度和表面形态对溅射产率具有协同作用。在面对低能量等离子体的等离子体材料的现实条件下，这种溅射产率的提高更为严重。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Fusion Engineering and Design 工程技术-核科学技术

CiteScore

3.50

自引率

23.50%

发文量

275

审稿时长

3.8 months

期刊介绍： The journal accepts papers about experiments (both plasma and technology), theory, models, methods, and designs in areas relating to technology, engineering, and applied science aspects of magnetic and inertial fusion energy. Specific areas of interest include: MFE and IFE design studies for experiments and reactors; fusion nuclear technologies and materials, including blankets and shields; analysis of reactor plasmas; plasma heating, fuelling, and vacuum systems; drivers, targets, and special technologies for IFE, controls and diagnostics; fuel cycle analysis and tritium reprocessing and handling; operations and remote maintenance of reactors; safety, decommissioning, and waste management; economic and environmental analysis of components and systems.