On the thermodynamics of Barium Oxyfluoride precursor in YBCO growth via MOD process

M. De Angelis, M. Tomellini
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Abstract

Barium Oxyfluoride plays an important role, as precursor species, in the nucleation and growth of YBa2Cu3O7-δ (YBCO) via the low fluorine Metal Organic Decomposition (MOD low-fluorine) route. In this contribution, we present a study on the thermodynamics of the Oxyfluoride by processing experimental data on the YBCO growth at LaAlO3 (LAO) substrate. The analysis allows one to determine the standard enthalpy and the standard entropy changes for Oxyfluoride formation from Barium oxide and Barium fluoride. To identify the thermodynamically more favorable route to the Oxyfluoride formation in the MOD low-fluorine process, the free energy change for the formation of the precursor, through reactions involving gas water, has been determined. The free energy of formation via fluoride and water indicates higher stability of oxygen rich Oxyfluoride for (P_HF^2)/P_(H_2 O) <10^(-6). In the framework of the nucleation theory the present results are needed to study the effect of precursor composition on film orientation.
关于通过 MOD 工艺生长 YBCO 的氟化钡前驱体的热力学
在通过低氟金属有机分解(MOD 低氟)路线成核和生长 YBa2Cu3O7-δ (YBCO) 的过程中,氧氟化钡作为前驱体物种发挥着重要作用。在这篇论文中,我们通过处理在 LaAlO3 (LAO) 衬底上生长 YBCO 的实验数据,对氧氟化物的热力学进行了研究。通过分析,我们可以确定氧化钡和氟化钡形成氧氟化物的标准焓和标准熵变化。为了确定 MOD 低氟工艺中形成氧氟化物的热力学上更有利的途径,确定了通过涉及气态水的反应形成前驱体的自由能变化。通过氟化物和水形成的自由能表明,当 (P_HF^2)/P_(H_2 O) <10^(-6) 时,富氧氟化物的稳定性更高。在成核理论的框架内,需要用本研究结果来研究前驱体成分对薄膜取向的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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