Extraction of nanometer-scale displacements from noisy signals at frequencies down to 1 mHz obtained by differential laser Doppler vibrometry

IF 0.8 Q4 INSTRUMENTS & INSTRUMENTATION
D. Kohlmann, M. Schewe, H. Wulfmeier, Christian Rembe, Holger Fritze
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引用次数: 0

Abstract

Abstract. A method is presented by which very small, slow, anharmonic signals can be extracted from measurement data overlaid with noise that is orders of magnitude larger than the signal of interest. To this end, a multi-step filtering process is applied to a time signal containing the time-dependent displacement of the surface of a sample, which is determined with a contactless measurement method, differential laser Doppler vibrometry (D-LDV), at elevated temperatures. The time signal contains the phase difference of the measurement and reference laser beams of the D-LDV, already greatly reducing noise from, e.g., length fluctuations, heat haze, and mechanical vibrations. In postprocessing of the data, anharmonic signal contributions are identified and extracted to show the accurate displacement originating from thickness changes of thin films and related sample bending. The approach is demonstrated on a Pr0.1Ce0.9O2−δ (PCO) thin film deposited on a single-crystalline ZrO2-based substrate. The displacement extracted from the data is ca. 38 % larger and the uncertainty ca. 35 % lower than those calculated directly from the D-LDV spectrum.
从差分激光多普勒测振仪获得的频率低至 1 mHz 的噪声信号中提取纳米级位移
摘要本文介绍了一种方法,通过这种方法可以从覆盖着比相关信号大几个数量级的噪声的测量数据中提取出非常小的、缓慢的非谐波信号。为此,对包含样品表面随时间变化的位移的时间信号进行了多步滤波处理,该位移是在高温下通过非接触式测量方法--差分激光多普勒测振法(D-LDV)测定的。时间信号包含 D-LDV 测量激光束和参考激光束的相位差,大大降低了由长度波动、热雾和机械振动等引起的噪音。在对数据进行后处理时,会识别并提取非谐波信号,以显示薄膜厚度变化和相关样品弯曲引起的精确位移。该方法在沉积在单晶氧化锆基底上的 Pr0.1Ce0.9O2-δ (PCO) 薄膜上进行了演示。从数据中提取的位移比直接从 D-LDV 光谱计算的位移大约 38%,不确定性低约 35%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems INSTRUMENTS & INSTRUMENTATION-
CiteScore
2.30
自引率
10.00%
发文量
26
审稿时长
23 weeks
期刊介绍: Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application, and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, sensor technologies, and applications. The goal of JSSS is to provide a platform for scientists and professionals in academia – as well as for developers, engineers, and users – to discuss new developments and advancements in sensors and sensor systems.
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