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Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach

The International Journal of Advanced Manufacturing Technology Pub Date : 2024-07-16 DOI:10.1007/s00170-024-14105-6
Tin-Chih Toly Chen, Yu-Cheng Wang, Chi-Wei Lin
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利用工业 4.0 和 XAI 方法提高晶圆制造中输出投影的效率
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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The International Journal of Advanced Manufacturing Technology
The International Journal of Advanced Manufacturing Technology
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